12/15/2010	9:42:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/15/2010	9:42:11 AM	Recipe started at 9:42 AM
12/15/2010	9:42:11 AM	H2 valve closed
12/15/2010	9:42:11 AM	BCl3 valve closed
12/15/2010	9:42:11 AM	PH3 valve closed
12/15/2010	9:42:11 AM	SiCl4 pre valve closed
12/15/2010	9:42:11 AM	SiCl4 post valve closed
12/15/2010	9:42:11 AM	Main Vac valve closed
12/15/2010	9:42:11 AM	Bypass valve closed
12/15/2010	9:42:11 AM	Bubbler valve closed
12/15/2010	9:42:11 AM	Helium valve opened
12/15/2010	9:42:11 AM	Helium MFC set to  500.000000
12/15/2010	9:42:11 AM	H2 MFC set to  0.000000
12/15/2010	9:42:11 AM	BCl3 MFC set to  0.000000
12/15/2010	9:42:11 AM	PHl3 MFC set to  0.000000
12/15/2010	9:42:11 AM	SiCl4 MFC set to  0.000000
12/15/2010	9:42:11 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	9:42:11 AM	Tube furnace set to 0
12/15/2010	9:43:32 AM	Helium valve closed
12/15/2010	9:43:32 AM	H2 valve closed
12/15/2010	9:43:32 AM	BCl3 valve closed
12/15/2010	9:43:32 AM	PH3 valve closed
12/15/2010	9:43:32 AM	SiCl4 pre valve closed
12/15/2010	9:43:32 AM	SiCl4 post valve closed
12/15/2010	9:43:32 AM	Main Vac valve closed
12/15/2010	9:43:32 AM	Bypass valve closed
12/15/2010	9:43:32 AM	Bubbler valve closed
12/15/2010	9:43:32 AM	Helium MFC set to  0.000000
12/15/2010	9:43:32 AM	H2 MFC set to  0.000000
12/15/2010	9:43:32 AM	BCl3 MFC set to  0.000000
12/15/2010	9:43:32 AM	PHl3 MFC set to  0.000000
12/15/2010	9:43:32 AM	SiCl4 MFC set to  0.000000
12/15/2010	9:43:32 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	9:43:32 AM	Tube furnace set to 0
12/15/2010	9:43:32 AM	Run finished at 9:43 AM
12/15/2010	9:43:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/15/2010	10:34:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/15/2010	10:35:02 AM	Recipe started at 10:34 AM
12/15/2010	10:35:02 AM	Helium valve closed
12/15/2010	10:35:02 AM	H2 valve closed
12/15/2010	10:35:02 AM	BCl3 valve closed
12/15/2010	10:35:02 AM	PH3 valve closed
12/15/2010	10:35:02 AM	SiCl4 pre valve closed
12/15/2010	10:35:02 AM	SiCl4 post valve closed
12/15/2010	10:35:02 AM	Main Vac valve closed
12/15/2010	10:35:03 AM	Bubbler valve closed
12/15/2010	10:35:03 AM	Bypass valve opened
12/15/2010	10:35:03 AM	Helium MFC set to  0.000000
12/15/2010	10:35:03 AM	H2 MFC set to  0.000000
12/15/2010	10:35:03 AM	BCl3 MFC set to  0.000000
12/15/2010	10:35:03 AM	PHl3 MFC set to  0.000000
12/15/2010	10:35:03 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:35:03 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:35:03 AM	Tube furnace set to 0
12/15/2010	10:36:00 AM	Helium valve closed
12/15/2010	10:36:00 AM	H2 valve closed
12/15/2010	10:36:00 AM	BCl3 valve closed
12/15/2010	10:36:00 AM	PH3 valve closed
12/15/2010	10:36:00 AM	SiCl4 pre valve closed
12/15/2010	10:36:00 AM	SiCl4 post valve closed
12/15/2010	10:36:00 AM	Bubbler valve closed
12/15/2010	10:36:00 AM	Main Vac valve opened
12/15/2010	10:36:00 AM	Bypass valve opened
12/15/2010	10:36:00 AM	Helium MFC set to  0.000000
12/15/2010	10:36:00 AM	H2 MFC set to  0.000000
12/15/2010	10:36:00 AM	BCl3 MFC set to  0.000000
12/15/2010	10:36:00 AM	PHl3 MFC set to  0.000000
12/15/2010	10:36:00 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:36:00 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:36:00 AM	Tube furnace set to 0
12/15/2010	10:37:00 AM	H2 valve closed
12/15/2010	10:37:00 AM	BCl3 valve closed
12/15/2010	10:37:00 AM	PH3 valve closed
12/15/2010	10:37:00 AM	SiCl4 pre valve closed
12/15/2010	10:37:00 AM	SiCl4 post valve closed
12/15/2010	10:37:00 AM	Bubbler valve closed
12/15/2010	10:37:00 AM	Helium valve opened
12/15/2010	10:37:00 AM	Main Vac valve opened
12/15/2010	10:37:00 AM	Bypass valve opened
12/15/2010	10:37:00 AM	Helium MFC set to  100.000000
12/15/2010	10:37:00 AM	H2 MFC set to  0.000000
12/15/2010	10:37:00 AM	BCl3 MFC set to  0.000000
12/15/2010	10:37:00 AM	PHl3 MFC set to  0.000000
12/15/2010	10:37:00 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:37:00 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:37:01 AM	Tube furnace set to 0
12/15/2010	10:38:01 AM	Helium valve closed
12/15/2010	10:38:01 AM	H2 valve closed
12/15/2010	10:38:01 AM	BCl3 valve closed
12/15/2010	10:38:01 AM	PH3 valve closed
12/15/2010	10:38:01 AM	SiCl4 pre valve closed
12/15/2010	10:38:01 AM	SiCl4 post valve closed
12/15/2010	10:38:01 AM	Bubbler valve closed
12/15/2010	10:38:01 AM	Main Vac valve opened
12/15/2010	10:38:01 AM	Bypass valve opened
12/15/2010	10:38:01 AM	Helium MFC set to  0.000000
12/15/2010	10:38:01 AM	H2 MFC set to  0.000000
12/15/2010	10:38:01 AM	BCl3 MFC set to  0.000000
12/15/2010	10:38:01 AM	PHl3 MFC set to  0.000000
12/15/2010	10:38:01 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:38:01 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:38:01 AM	Tube furnace set to 0
12/15/2010	10:39:01 AM	H2 valve closed
12/15/2010	10:39:01 AM	BCl3 valve closed
12/15/2010	10:39:01 AM	PH3 valve closed
12/15/2010	10:39:01 AM	SiCl4 pre valve closed
12/15/2010	10:39:01 AM	SiCl4 post valve closed
12/15/2010	10:39:01 AM	Bubbler valve closed
12/15/2010	10:39:01 AM	Helium valve opened
12/15/2010	10:39:01 AM	Main Vac valve opened
12/15/2010	10:39:01 AM	Bypass valve opened
12/15/2010	10:39:01 AM	Helium MFC set to  100.000000
12/15/2010	10:39:01 AM	H2 MFC set to  0.000000
12/15/2010	10:39:01 AM	BCl3 MFC set to  0.000000
12/15/2010	10:39:01 AM	PHl3 MFC set to  0.000000
12/15/2010	10:39:01 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:39:01 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:39:01 AM	Tube furnace set to 0
12/15/2010	10:40:01 AM	Helium valve closed
12/15/2010	10:40:01 AM	H2 valve closed
12/15/2010	10:40:01 AM	BCl3 valve closed
12/15/2010	10:40:01 AM	PH3 valve closed
12/15/2010	10:40:01 AM	SiCl4 pre valve closed
12/15/2010	10:40:01 AM	SiCl4 post valve closed
12/15/2010	10:40:01 AM	Bubbler valve closed
12/15/2010	10:40:01 AM	Main Vac valve opened
12/15/2010	10:40:01 AM	Bypass valve opened
12/15/2010	10:40:01 AM	Helium MFC set to  0.000000
12/15/2010	10:40:01 AM	H2 MFC set to  0.000000
12/15/2010	10:40:01 AM	BCl3 MFC set to  0.000000
12/15/2010	10:40:01 AM	PHl3 MFC set to  0.000000
12/15/2010	10:40:01 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:40:01 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:40:01 AM	Tube furnace set to 0
12/15/2010	10:41:01 AM	H2 valve closed
12/15/2010	10:41:01 AM	BCl3 valve closed
12/15/2010	10:41:01 AM	PH3 valve closed
12/15/2010	10:41:01 AM	SiCl4 pre valve closed
12/15/2010	10:41:01 AM	SiCl4 post valve closed
12/15/2010	10:41:01 AM	Bubbler valve closed
12/15/2010	10:41:01 AM	Helium valve opened
12/15/2010	10:41:01 AM	Main Vac valve opened
12/15/2010	10:41:01 AM	Bypass valve opened
12/15/2010	10:41:01 AM	Helium MFC set to  100.000000
12/15/2010	10:41:01 AM	H2 MFC set to  0.000000
12/15/2010	10:41:01 AM	BCl3 MFC set to  0.000000
12/15/2010	10:41:01 AM	PHl3 MFC set to  0.000000
12/15/2010	10:41:01 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:41:01 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:41:01 AM	Tube furnace set to 0
12/15/2010	10:42:01 AM	Helium valve closed
12/15/2010	10:42:01 AM	H2 valve closed
12/15/2010	10:42:01 AM	BCl3 valve closed
12/15/2010	10:42:01 AM	PH3 valve closed
12/15/2010	10:42:01 AM	SiCl4 pre valve closed
12/15/2010	10:42:01 AM	SiCl4 post valve closed
12/15/2010	10:42:01 AM	Bubbler valve closed
12/15/2010	10:42:01 AM	Main Vac valve opened
12/15/2010	10:42:01 AM	Bypass valve opened
12/15/2010	10:42:01 AM	Helium MFC set to  0.000000
12/15/2010	10:42:01 AM	H2 MFC set to  0.000000
12/15/2010	10:42:01 AM	BCl3 MFC set to  0.000000
12/15/2010	10:42:01 AM	PHl3 MFC set to  0.000000
12/15/2010	10:42:01 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:42:01 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:42:02 AM	Tube furnace set to 0
12/15/2010	10:43:02 AM	H2 valve closed
12/15/2010	10:43:02 AM	BCl3 valve closed
12/15/2010	10:43:02 AM	PH3 valve closed
12/15/2010	10:43:02 AM	SiCl4 pre valve closed
12/15/2010	10:43:02 AM	SiCl4 post valve closed
12/15/2010	10:43:02 AM	Bubbler valve closed
12/15/2010	10:43:02 AM	Helium valve opened
12/15/2010	10:43:02 AM	Main Vac valve opened
12/15/2010	10:43:02 AM	Bypass valve opened
12/15/2010	10:43:02 AM	Helium MFC set to  100.000000
12/15/2010	10:43:02 AM	H2 MFC set to  0.000000
12/15/2010	10:43:02 AM	BCl3 MFC set to  0.000000
12/15/2010	10:43:02 AM	PHl3 MFC set to  0.000000
12/15/2010	10:43:02 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:43:02 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:43:02 AM	Tube furnace set to 0
12/15/2010	10:44:02 AM	Helium valve closed
12/15/2010	10:44:02 AM	H2 valve closed
12/15/2010	10:44:02 AM	BCl3 valve closed
12/15/2010	10:44:02 AM	PH3 valve closed
12/15/2010	10:44:02 AM	SiCl4 pre valve closed
12/15/2010	10:44:02 AM	SiCl4 post valve closed
12/15/2010	10:44:02 AM	Bubbler valve closed
12/15/2010	10:44:02 AM	Main Vac valve opened
12/15/2010	10:44:02 AM	Bypass valve opened
12/15/2010	10:44:02 AM	Helium MFC set to  0.000000
12/15/2010	10:44:02 AM	H2 MFC set to  0.000000
12/15/2010	10:44:02 AM	BCl3 MFC set to  0.000000
12/15/2010	10:44:02 AM	PHl3 MFC set to  0.000000
12/15/2010	10:44:02 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:44:02 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:44:02 AM	Tube furnace set to 0
12/15/2010	10:45:02 AM	H2 valve closed
12/15/2010	10:45:02 AM	BCl3 valve closed
12/15/2010	10:45:02 AM	PH3 valve closed
12/15/2010	10:45:02 AM	SiCl4 pre valve closed
12/15/2010	10:45:02 AM	SiCl4 post valve closed
12/15/2010	10:45:02 AM	Bubbler valve closed
12/15/2010	10:45:02 AM	Helium valve opened
12/15/2010	10:45:02 AM	Main Vac valve opened
12/15/2010	10:45:02 AM	Bypass valve opened
12/15/2010	10:45:02 AM	Helium MFC set to  100.000000
12/15/2010	10:45:02 AM	H2 MFC set to  0.000000
12/15/2010	10:45:02 AM	BCl3 MFC set to  0.000000
12/15/2010	10:45:02 AM	PHl3 MFC set to  0.000000
12/15/2010	10:45:02 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:45:02 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:45:02 AM	Tube furnace set to 0
12/15/2010	10:46:02 AM	Helium valve closed
12/15/2010	10:46:02 AM	H2 valve closed
12/15/2010	10:46:02 AM	BCl3 valve closed
12/15/2010	10:46:02 AM	PH3 valve closed
12/15/2010	10:46:02 AM	SiCl4 pre valve closed
12/15/2010	10:46:02 AM	SiCl4 post valve closed
12/15/2010	10:46:02 AM	Bubbler valve closed
12/15/2010	10:46:02 AM	Main Vac valve opened
12/15/2010	10:46:02 AM	Bypass valve opened
12/15/2010	10:46:02 AM	Helium MFC set to  0.000000
12/15/2010	10:46:02 AM	H2 MFC set to  0.000000
12/15/2010	10:46:02 AM	BCl3 MFC set to  0.000000
12/15/2010	10:46:02 AM	PHl3 MFC set to  0.000000
12/15/2010	10:46:02 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:46:02 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:46:02 AM	Tube furnace set to 0
12/15/2010	10:47:02 AM	H2 valve closed
12/15/2010	10:47:02 AM	BCl3 valve closed
12/15/2010	10:47:02 AM	PH3 valve closed
12/15/2010	10:47:02 AM	SiCl4 pre valve closed
12/15/2010	10:47:02 AM	SiCl4 post valve closed
12/15/2010	10:47:02 AM	Bubbler valve closed
12/15/2010	10:47:02 AM	Helium valve opened
12/15/2010	10:47:02 AM	Main Vac valve opened
12/15/2010	10:47:02 AM	Bypass valve opened
12/15/2010	10:47:02 AM	Helium MFC set to  100.000000
12/15/2010	10:47:02 AM	H2 MFC set to  0.000000
12/15/2010	10:47:02 AM	BCl3 MFC set to  0.000000
12/15/2010	10:47:02 AM	PHl3 MFC set to  0.000000
12/15/2010	10:47:02 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:47:02 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:47:03 AM	Tube furnace set to 0
12/15/2010	10:48:03 AM	Helium valve closed
12/15/2010	10:48:03 AM	H2 valve closed
12/15/2010	10:48:03 AM	BCl3 valve closed
12/15/2010	10:48:03 AM	PH3 valve closed
12/15/2010	10:48:03 AM	SiCl4 pre valve closed
12/15/2010	10:48:03 AM	SiCl4 post valve closed
12/15/2010	10:48:03 AM	Bubbler valve closed
12/15/2010	10:48:03 AM	Main Vac valve opened
12/15/2010	10:48:03 AM	Bypass valve opened
12/15/2010	10:48:03 AM	Helium MFC set to  0.000000
12/15/2010	10:48:03 AM	H2 MFC set to  0.000000
12/15/2010	10:48:03 AM	BCl3 MFC set to  0.000000
12/15/2010	10:48:03 AM	PHl3 MFC set to  0.000000
12/15/2010	10:48:03 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:48:03 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:48:03 AM	Tube furnace set to 0
12/15/2010	10:49:03 AM	H2 valve closed
12/15/2010	10:49:03 AM	BCl3 valve closed
12/15/2010	10:49:03 AM	PH3 valve closed
12/15/2010	10:49:03 AM	SiCl4 pre valve closed
12/15/2010	10:49:03 AM	SiCl4 post valve closed
12/15/2010	10:49:03 AM	Bubbler valve closed
12/15/2010	10:49:03 AM	Helium valve opened
12/15/2010	10:49:03 AM	Main Vac valve opened
12/15/2010	10:49:03 AM	Bypass valve opened
12/15/2010	10:49:03 AM	Helium MFC set to  100.000000
12/15/2010	10:49:03 AM	H2 MFC set to  0.000000
12/15/2010	10:49:03 AM	BCl3 MFC set to  0.000000
12/15/2010	10:49:03 AM	PHl3 MFC set to  0.000000
12/15/2010	10:49:03 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:49:03 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:49:03 AM	Tube furnace set to 0
12/15/2010	10:50:03 AM	Helium valve closed
12/15/2010	10:50:03 AM	H2 valve closed
12/15/2010	10:50:03 AM	BCl3 valve closed
12/15/2010	10:50:03 AM	PH3 valve closed
12/15/2010	10:50:03 AM	SiCl4 pre valve closed
12/15/2010	10:50:03 AM	SiCl4 post valve closed
12/15/2010	10:50:03 AM	Bubbler valve closed
12/15/2010	10:50:03 AM	Main Vac valve opened
12/15/2010	10:50:03 AM	Bypass valve opened
12/15/2010	10:50:03 AM	Helium MFC set to  0.000000
12/15/2010	10:50:03 AM	H2 MFC set to  0.000000
12/15/2010	10:50:03 AM	BCl3 MFC set to  0.000000
12/15/2010	10:50:03 AM	PHl3 MFC set to  0.000000
12/15/2010	10:50:03 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:50:03 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:50:03 AM	Tube furnace set to 0
12/15/2010	10:51:03 AM	H2 valve closed
12/15/2010	10:51:03 AM	BCl3 valve closed
12/15/2010	10:51:03 AM	PH3 valve closed
12/15/2010	10:51:03 AM	SiCl4 pre valve closed
12/15/2010	10:51:03 AM	SiCl4 post valve closed
12/15/2010	10:51:03 AM	Bubbler valve closed
12/15/2010	10:51:03 AM	Helium valve opened
12/15/2010	10:51:03 AM	Main Vac valve opened
12/15/2010	10:51:03 AM	Bypass valve opened
12/15/2010	10:51:03 AM	Helium MFC set to  100.000000
12/15/2010	10:51:03 AM	H2 MFC set to  0.000000
12/15/2010	10:51:03 AM	BCl3 MFC set to  0.000000
12/15/2010	10:51:03 AM	PHl3 MFC set to  0.000000
12/15/2010	10:51:03 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:51:03 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:51:03 AM	Tube furnace set to 0
12/15/2010	10:52:03 AM	Helium valve closed
12/15/2010	10:52:03 AM	H2 valve closed
12/15/2010	10:52:03 AM	BCl3 valve closed
12/15/2010	10:52:03 AM	PH3 valve closed
12/15/2010	10:52:03 AM	SiCl4 pre valve closed
12/15/2010	10:52:03 AM	SiCl4 post valve closed
12/15/2010	10:52:03 AM	Bubbler valve closed
12/15/2010	10:52:03 AM	Main Vac valve opened
12/15/2010	10:52:03 AM	Bypass valve opened
12/15/2010	10:52:03 AM	Helium MFC set to  0.000000
12/15/2010	10:52:03 AM	H2 MFC set to  0.000000
12/15/2010	10:52:03 AM	BCl3 MFC set to  0.000000
12/15/2010	10:52:03 AM	PHl3 MFC set to  0.000000
12/15/2010	10:52:03 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:52:03 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:52:03 AM	Tube furnace set to 0
12/15/2010	10:53:04 AM	H2 valve closed
12/15/2010	10:53:04 AM	BCl3 valve closed
12/15/2010	10:53:04 AM	PH3 valve closed
12/15/2010	10:53:04 AM	SiCl4 pre valve closed
12/15/2010	10:53:04 AM	SiCl4 post valve closed
12/15/2010	10:53:04 AM	Bubbler valve closed
12/15/2010	10:53:04 AM	Helium valve opened
12/15/2010	10:53:04 AM	Main Vac valve opened
12/15/2010	10:53:04 AM	Bypass valve opened
12/15/2010	10:53:04 AM	Helium MFC set to  100.000000
12/15/2010	10:53:04 AM	H2 MFC set to  0.000000
12/15/2010	10:53:04 AM	BCl3 MFC set to  0.000000
12/15/2010	10:53:04 AM	PHl3 MFC set to  0.000000
12/15/2010	10:53:04 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:53:04 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:53:04 AM	Tube furnace set to 0
12/15/2010	10:54:04 AM	Helium valve closed
12/15/2010	10:54:04 AM	H2 valve closed
12/15/2010	10:54:04 AM	BCl3 valve closed
12/15/2010	10:54:04 AM	PH3 valve closed
12/15/2010	10:54:04 AM	SiCl4 pre valve closed
12/15/2010	10:54:04 AM	SiCl4 post valve closed
12/15/2010	10:54:04 AM	Bubbler valve closed
12/15/2010	10:54:04 AM	Main Vac valve opened
12/15/2010	10:54:04 AM	Bypass valve opened
12/15/2010	10:54:04 AM	Helium MFC set to  0.000000
12/15/2010	10:54:04 AM	H2 MFC set to  0.000000
12/15/2010	10:54:04 AM	BCl3 MFC set to  0.000000
12/15/2010	10:54:04 AM	PHl3 MFC set to  0.000000
12/15/2010	10:54:04 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:54:04 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:54:04 AM	Tube furnace set to 0
12/15/2010	10:55:04 AM	H2 valve closed
12/15/2010	10:55:04 AM	BCl3 valve closed
12/15/2010	10:55:04 AM	PH3 valve closed
12/15/2010	10:55:04 AM	SiCl4 pre valve closed
12/15/2010	10:55:04 AM	SiCl4 post valve closed
12/15/2010	10:55:04 AM	Bubbler valve closed
12/15/2010	10:55:04 AM	Helium valve opened
12/15/2010	10:55:04 AM	Main Vac valve opened
12/15/2010	10:55:04 AM	Bypass valve opened
12/15/2010	10:55:04 AM	Helium MFC set to  100.000000
12/15/2010	10:55:04 AM	H2 MFC set to  0.000000
12/15/2010	10:55:04 AM	BCl3 MFC set to  0.000000
12/15/2010	10:55:04 AM	PHl3 MFC set to  0.000000
12/15/2010	10:55:04 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:55:04 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:55:04 AM	Tube furnace set to 0
12/15/2010	10:56:04 AM	Helium valve closed
12/15/2010	10:56:04 AM	H2 valve closed
12/15/2010	10:56:04 AM	BCl3 valve closed
12/15/2010	10:56:04 AM	PH3 valve closed
12/15/2010	10:56:04 AM	SiCl4 pre valve closed
12/15/2010	10:56:04 AM	SiCl4 post valve closed
12/15/2010	10:56:04 AM	Bubbler valve closed
12/15/2010	10:56:04 AM	Main Vac valve opened
12/15/2010	10:56:04 AM	Bypass valve opened
12/15/2010	10:56:04 AM	Helium MFC set to  0.000000
12/15/2010	10:56:04 AM	H2 MFC set to  0.000000
12/15/2010	10:56:04 AM	BCl3 MFC set to  0.000000
12/15/2010	10:56:04 AM	PHl3 MFC set to  0.000000
12/15/2010	10:56:04 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:56:04 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:56:04 AM	Tube furnace set to 0
12/15/2010	10:56:05 AM	Run finished at 10:56 AM
12/15/2010	10:56:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/15/2010	10:57:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/15/2010	10:57:48 AM	Recipe started at 10:57 AM
12/15/2010	10:57:48 AM	Helium valve closed
12/15/2010	10:57:48 AM	H2 valve closed
12/15/2010	10:57:48 AM	BCl3 valve closed
12/15/2010	10:57:48 AM	PH3 valve closed
12/15/2010	10:57:48 AM	SiCl4 pre valve closed
12/15/2010	10:57:48 AM	SiCl4 post valve closed
12/15/2010	10:57:48 AM	Main Vac valve closed
12/15/2010	10:57:48 AM	Bypass valve closed
12/15/2010	10:57:48 AM	Bubbler valve closed
12/15/2010	10:57:48 AM	Helium MFC set to  0.000000
12/15/2010	10:57:48 AM	H2 MFC set to  0.000000
12/15/2010	10:57:48 AM	BCl3 MFC set to  0.000000
12/15/2010	10:57:48 AM	PHl3 MFC set to  0.000000
12/15/2010	10:57:48 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:57:48 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:57:49 AM	Tube furnace set to 0
12/15/2010	10:57:49 AM	Run finished at 10:57 AM
12/15/2010	10:57:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/15/2010	10:58:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/15/2010	10:58:26 AM	Recipe started at 10:58 AM
12/15/2010	10:58:26 AM	Helium valve closed
12/15/2010	10:58:26 AM	H2 valve closed
12/15/2010	10:58:26 AM	BCl3 valve closed
12/15/2010	10:58:26 AM	PH3 valve closed
12/15/2010	10:58:26 AM	SiCl4 pre valve closed
12/15/2010	10:58:26 AM	SiCl4 post valve closed
12/15/2010	10:58:26 AM	Main Vac valve closed
12/15/2010	10:58:27 AM	Bubbler valve closed
12/15/2010	10:58:27 AM	Bypass valve opened
12/15/2010	10:58:27 AM	Helium MFC set to  0.000000
12/15/2010	10:58:27 AM	H2 MFC set to  0.000000
12/15/2010	10:58:27 AM	BCl3 MFC set to  0.000000
12/15/2010	10:58:27 AM	PHl3 MFC set to  0.000000
12/15/2010	10:58:27 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:58:27 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:58:27 AM	Tube furnace set to 0
12/15/2010	10:58:27 AM	Helium valve closed
12/15/2010	10:58:27 AM	H2 valve closed
12/15/2010	10:58:27 AM	BCl3 valve closed
12/15/2010	10:58:27 AM	PH3 valve closed
12/15/2010	10:58:27 AM	SiCl4 pre valve closed
12/15/2010	10:58:27 AM	SiCl4 post valve closed
12/15/2010	10:58:27 AM	Bubbler valve closed
12/15/2010	10:58:27 AM	Main Vac valve opened
12/15/2010	10:58:27 AM	Bypass valve opened
12/15/2010	10:58:27 AM	Helium MFC set to  0.000000
12/15/2010	10:58:27 AM	H2 MFC set to  0.000000
12/15/2010	10:58:27 AM	BCl3 MFC set to  0.000000
12/15/2010	10:58:27 AM	PHl3 MFC set to  0.000000
12/15/2010	10:58:27 AM	SiCl4 MFC set to  0.000000
12/15/2010	10:58:27 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	10:58:27 AM	Tube furnace set to 0
12/15/2010	10:58:27 AM	Run finished at 10:58 AM
12/15/2010	10:58:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/15/2010	11:27:46 AM	Recipe started at 11:27 AM
12/15/2010	11:27:46 AM	Helium valve closed
12/15/2010	11:27:46 AM	BCl3 valve closed
12/15/2010	11:27:46 AM	PH3 valve closed
12/15/2010	11:27:46 AM	SiCl4 pre valve closed
12/15/2010	11:27:46 AM	SiCl4 post valve closed
12/15/2010	11:27:46 AM	Main Vac valve closed
12/15/2010	11:27:46 AM	Bypass valve closed
12/15/2010	11:27:46 AM	Bubbler valve closed
12/15/2010	11:27:46 AM	H2 valve opened
12/15/2010	11:27:46 AM	Helium MFC set to  0.000000
12/15/2010	11:27:46 AM	H2 MFC set to  500.000000
12/15/2010	11:27:46 AM	BCl3 MFC set to  0.000000
12/15/2010	11:27:46 AM	PHl3 MFC set to  0.000000
12/15/2010	11:27:46 AM	SiCl4 MFC set to  0.000000
12/15/2010	11:27:46 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	11:27:46 AM	Tube furnace set to 100
12/15/2010	11:29:09 AM	Helium valve closed
12/15/2010	11:29:09 AM	BCl3 valve closed
12/15/2010	11:29:09 AM	PH3 valve closed
12/15/2010	11:29:09 AM	SiCl4 pre valve closed
12/15/2010	11:29:09 AM	SiCl4 post valve closed
12/15/2010	11:29:09 AM	Main Vac valve closed
12/15/2010	11:29:09 AM	Bypass valve closed
12/15/2010	11:29:09 AM	H2 valve opened
12/15/2010	11:29:09 AM	Bubbler valve opened
12/15/2010	11:29:09 AM	Helium MFC set to  0.000000
12/15/2010	11:29:09 AM	H2 MFC set to  500.000000
12/15/2010	11:29:09 AM	BCl3 MFC set to  0.000000
12/15/2010	11:29:09 AM	PHl3 MFC set to  0.000000
12/15/2010	11:29:09 AM	SiCl4 MFC set to  0.000000
12/15/2010	11:29:09 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	11:29:09 AM	Tube furnace set to 1000
12/15/2010	11:49:09 AM	Helium valve closed
12/15/2010	11:49:09 AM	PH3 valve closed
12/15/2010	11:49:09 AM	Main Vac valve closed
12/15/2010	11:49:09 AM	Bypass valve closed
12/15/2010	11:49:09 AM	H2 valve opened
12/15/2010	11:49:09 AM	BCl3 valve opened
12/15/2010	11:49:09 AM	SiCl4 pre valve opened
12/15/2010	11:49:09 AM	SiCl4 post valve opened
12/15/2010	11:49:09 AM	Bubbler valve opened
12/15/2010	11:49:09 AM	Helium MFC set to  0.000000
12/15/2010	11:49:09 AM	H2 MFC set to  500.000000
12/15/2010	11:49:09 AM	BCl3 MFC set to  10.000000
12/15/2010	11:49:09 AM	PHl3 MFC set to  0.000000
12/15/2010	11:49:09 AM	SiCl4 MFC set to  50.000000
12/15/2010	11:49:09 AM	Bypass solenoid MFC set to  0.000000
12/15/2010	11:49:09 AM	Tube furnace set to 1000
12/15/2010	12:04:09 PM	H2 valve closed
12/15/2010	12:04:09 PM	BCl3 valve closed
12/15/2010	12:04:09 PM	PH3 valve closed
12/15/2010	12:04:09 PM	SiCl4 pre valve closed
12/15/2010	12:04:09 PM	SiCl4 post valve closed
12/15/2010	12:04:09 PM	Main Vac valve closed
12/15/2010	12:04:09 PM	Bypass valve closed
12/15/2010	12:04:09 PM	Helium valve opened
12/15/2010	12:04:09 PM	Bubbler valve opened
12/15/2010	12:04:09 PM	Helium MFC set to  500.000000
12/15/2010	12:04:09 PM	H2 MFC set to  0.000000
12/15/2010	12:04:09 PM	BCl3 MFC set to  0.000000
12/15/2010	12:04:09 PM	PHl3 MFC set to  0.000000
12/15/2010	12:04:09 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:04:09 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:04:09 PM	Tube furnace set to 0
12/15/2010	12:24:09 PM	Helium valve closed
12/15/2010	12:24:09 PM	H2 valve closed
12/15/2010	12:24:09 PM	BCl3 valve closed
12/15/2010	12:24:09 PM	PH3 valve closed
12/15/2010	12:24:09 PM	SiCl4 pre valve closed
12/15/2010	12:24:09 PM	SiCl4 post valve closed
12/15/2010	12:24:09 PM	Main Vac valve closed
12/15/2010	12:24:09 PM	Bypass valve closed
12/15/2010	12:24:09 PM	Bubbler valve closed
12/15/2010	12:24:09 PM	Helium MFC set to  0.000000
12/15/2010	12:24:09 PM	H2 MFC set to  0.000000
12/15/2010	12:24:09 PM	BCl3 MFC set to  0.000000
12/15/2010	12:24:09 PM	PHl3 MFC set to  0.000000
12/15/2010	12:24:09 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:24:09 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:24:09 PM	Tube furnace set to 0
12/15/2010	12:24:10 PM	Run finished at 12:24 PM
12/15/2010	12:37:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/15/2010	12:37:53 PM	Recipe started at 12:37 PM
12/15/2010	12:37:53 PM	H2 valve closed
12/15/2010	12:37:53 PM	BCl3 valve closed
12/15/2010	12:37:53 PM	PH3 valve closed
12/15/2010	12:37:53 PM	SiCl4 pre valve closed
12/15/2010	12:37:53 PM	SiCl4 post valve closed
12/15/2010	12:37:53 PM	Main Vac valve closed
12/15/2010	12:37:53 PM	Bypass valve closed
12/15/2010	12:37:53 PM	Bubbler valve closed
12/15/2010	12:37:53 PM	Helium valve opened
12/15/2010	12:37:53 PM	Helium MFC set to  500.000000
12/15/2010	12:37:53 PM	H2 MFC set to  0.000000
12/15/2010	12:37:53 PM	BCl3 MFC set to  0.000000
12/15/2010	12:37:53 PM	PHl3 MFC set to  0.000000
12/15/2010	12:37:53 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:37:53 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:37:54 PM	Tube furnace set to 0
12/15/2010	12:38:00 PM	Helium valve closed
12/15/2010	12:38:00 PM	H2 valve closed
12/15/2010	12:38:00 PM	BCl3 valve closed
12/15/2010	12:38:00 PM	PH3 valve closed
12/15/2010	12:38:00 PM	SiCl4 pre valve closed
12/15/2010	12:38:00 PM	SiCl4 post valve closed
12/15/2010	12:38:00 PM	Main Vac valve closed
12/15/2010	12:38:00 PM	Bypass valve closed
12/15/2010	12:38:00 PM	Bubbler valve closed
12/15/2010	12:38:00 PM	Helium MFC set to  0.000000
12/15/2010	12:38:00 PM	H2 MFC set to  0.000000
12/15/2010	12:38:00 PM	BCl3 MFC set to  0.000000
12/15/2010	12:38:00 PM	PHl3 MFC set to  0.000000
12/15/2010	12:38:00 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:38:00 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:38:00 PM	Tube furnace set to 0
12/15/2010	12:38:01 PM	Run finished at 12:38 PM
12/15/2010	12:38:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/15/2010	12:47:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/15/2010	12:47:19 PM	Recipe started at 12:47 PM
12/15/2010	12:47:19 PM	Helium valve closed
12/15/2010	12:47:19 PM	H2 valve closed
12/15/2010	12:47:19 PM	BCl3 valve closed
12/15/2010	12:47:19 PM	PH3 valve closed
12/15/2010	12:47:19 PM	SiCl4 pre valve closed
12/15/2010	12:47:19 PM	SiCl4 post valve closed
12/15/2010	12:47:19 PM	Main Vac valve closed
12/15/2010	12:47:19 PM	Bubbler valve closed
12/15/2010	12:47:19 PM	Bypass valve opened
12/15/2010	12:47:19 PM	Helium MFC set to  0.000000
12/15/2010	12:47:19 PM	H2 MFC set to  0.000000
12/15/2010	12:47:19 PM	BCl3 MFC set to  0.000000
12/15/2010	12:47:19 PM	PHl3 MFC set to  0.000000
12/15/2010	12:47:19 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:47:19 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:47:20 PM	Tube furnace set to 0
12/15/2010	12:48:18 PM	Helium valve closed
12/15/2010	12:48:18 PM	H2 valve closed
12/15/2010	12:48:18 PM	BCl3 valve closed
12/15/2010	12:48:18 PM	PH3 valve closed
12/15/2010	12:48:18 PM	SiCl4 pre valve closed
12/15/2010	12:48:18 PM	SiCl4 post valve closed
12/15/2010	12:48:18 PM	Bubbler valve closed
12/15/2010	12:48:18 PM	Main Vac valve opened
12/15/2010	12:48:18 PM	Bypass valve opened
12/15/2010	12:48:18 PM	Helium MFC set to  0.000000
12/15/2010	12:48:18 PM	H2 MFC set to  0.000000
12/15/2010	12:48:18 PM	BCl3 MFC set to  0.000000
12/15/2010	12:48:18 PM	PHl3 MFC set to  0.000000
12/15/2010	12:48:18 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:48:18 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:48:18 PM	Tube furnace set to 0
12/15/2010	12:49:18 PM	H2 valve closed
12/15/2010	12:49:18 PM	BCl3 valve closed
12/15/2010	12:49:18 PM	PH3 valve closed
12/15/2010	12:49:18 PM	SiCl4 pre valve closed
12/15/2010	12:49:18 PM	SiCl4 post valve closed
12/15/2010	12:49:18 PM	Bubbler valve closed
12/15/2010	12:49:18 PM	Helium valve opened
12/15/2010	12:49:18 PM	Main Vac valve opened
12/15/2010	12:49:18 PM	Bypass valve opened
12/15/2010	12:49:18 PM	Helium MFC set to  100.000000
12/15/2010	12:49:18 PM	H2 MFC set to  0.000000
12/15/2010	12:49:18 PM	BCl3 MFC set to  0.000000
12/15/2010	12:49:18 PM	PHl3 MFC set to  0.000000
12/15/2010	12:49:18 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:49:18 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:49:18 PM	Tube furnace set to 0
12/15/2010	12:50:18 PM	Helium valve closed
12/15/2010	12:50:18 PM	H2 valve closed
12/15/2010	12:50:18 PM	BCl3 valve closed
12/15/2010	12:50:18 PM	PH3 valve closed
12/15/2010	12:50:18 PM	SiCl4 pre valve closed
12/15/2010	12:50:18 PM	SiCl4 post valve closed
12/15/2010	12:50:18 PM	Bubbler valve closed
12/15/2010	12:50:18 PM	Main Vac valve opened
12/15/2010	12:50:18 PM	Bypass valve opened
12/15/2010	12:50:18 PM	Helium MFC set to  0.000000
12/15/2010	12:50:19 PM	H2 MFC set to  0.000000
12/15/2010	12:50:19 PM	BCl3 MFC set to  0.000000
12/15/2010	12:50:19 PM	PHl3 MFC set to  0.000000
12/15/2010	12:50:19 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:50:19 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:50:19 PM	Tube furnace set to 0
12/15/2010	12:51:19 PM	H2 valve closed
12/15/2010	12:51:19 PM	BCl3 valve closed
12/15/2010	12:51:19 PM	PH3 valve closed
12/15/2010	12:51:19 PM	SiCl4 pre valve closed
12/15/2010	12:51:19 PM	SiCl4 post valve closed
12/15/2010	12:51:19 PM	Bubbler valve closed
12/15/2010	12:51:19 PM	Helium valve opened
12/15/2010	12:51:19 PM	Main Vac valve opened
12/15/2010	12:51:19 PM	Bypass valve opened
12/15/2010	12:51:19 PM	Helium MFC set to  100.000000
12/15/2010	12:51:19 PM	H2 MFC set to  0.000000
12/15/2010	12:51:19 PM	BCl3 MFC set to  0.000000
12/15/2010	12:51:19 PM	PHl3 MFC set to  0.000000
12/15/2010	12:51:19 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:51:19 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:51:19 PM	Tube furnace set to 0
12/15/2010	12:52:19 PM	Helium valve closed
12/15/2010	12:52:19 PM	H2 valve closed
12/15/2010	12:52:19 PM	BCl3 valve closed
12/15/2010	12:52:19 PM	PH3 valve closed
12/15/2010	12:52:19 PM	SiCl4 pre valve closed
12/15/2010	12:52:19 PM	SiCl4 post valve closed
12/15/2010	12:52:19 PM	Bubbler valve closed
12/15/2010	12:52:19 PM	Main Vac valve opened
12/15/2010	12:52:19 PM	Bypass valve opened
12/15/2010	12:52:19 PM	Helium MFC set to  0.000000
12/15/2010	12:52:19 PM	H2 MFC set to  0.000000
12/15/2010	12:52:19 PM	BCl3 MFC set to  0.000000
12/15/2010	12:52:19 PM	PHl3 MFC set to  0.000000
12/15/2010	12:52:19 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:52:19 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:52:19 PM	Tube furnace set to 0
12/15/2010	12:53:19 PM	H2 valve closed
12/15/2010	12:53:19 PM	BCl3 valve closed
12/15/2010	12:53:19 PM	PH3 valve closed
12/15/2010	12:53:19 PM	SiCl4 pre valve closed
12/15/2010	12:53:19 PM	SiCl4 post valve closed
12/15/2010	12:53:19 PM	Bubbler valve closed
12/15/2010	12:53:19 PM	Helium valve opened
12/15/2010	12:53:19 PM	Main Vac valve opened
12/15/2010	12:53:19 PM	Bypass valve opened
12/15/2010	12:53:19 PM	Helium MFC set to  100.000000
12/15/2010	12:53:19 PM	H2 MFC set to  0.000000
12/15/2010	12:53:19 PM	BCl3 MFC set to  0.000000
12/15/2010	12:53:19 PM	PHl3 MFC set to  0.000000
12/15/2010	12:53:19 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:53:19 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:53:19 PM	Tube furnace set to 0
12/15/2010	12:54:19 PM	Helium valve closed
12/15/2010	12:54:19 PM	H2 valve closed
12/15/2010	12:54:19 PM	BCl3 valve closed
12/15/2010	12:54:19 PM	PH3 valve closed
12/15/2010	12:54:19 PM	SiCl4 pre valve closed
12/15/2010	12:54:19 PM	SiCl4 post valve closed
12/15/2010	12:54:19 PM	Bubbler valve closed
12/15/2010	12:54:19 PM	Main Vac valve opened
12/15/2010	12:54:19 PM	Bypass valve opened
12/15/2010	12:54:19 PM	Helium MFC set to  0.000000
12/15/2010	12:54:19 PM	H2 MFC set to  0.000000
12/15/2010	12:54:19 PM	BCl3 MFC set to  0.000000
12/15/2010	12:54:19 PM	PHl3 MFC set to  0.000000
12/15/2010	12:54:19 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:54:19 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:54:19 PM	Tube furnace set to 0
12/15/2010	12:55:19 PM	H2 valve closed
12/15/2010	12:55:19 PM	BCl3 valve closed
12/15/2010	12:55:19 PM	PH3 valve closed
12/15/2010	12:55:19 PM	SiCl4 pre valve closed
12/15/2010	12:55:19 PM	SiCl4 post valve closed
12/15/2010	12:55:19 PM	Bubbler valve closed
12/15/2010	12:55:19 PM	Helium valve opened
12/15/2010	12:55:19 PM	Main Vac valve opened
12/15/2010	12:55:19 PM	Bypass valve opened
12/15/2010	12:55:19 PM	Helium MFC set to  100.000000
12/15/2010	12:55:19 PM	H2 MFC set to  0.000000
12/15/2010	12:55:19 PM	BCl3 MFC set to  0.000000
12/15/2010	12:55:19 PM	PHl3 MFC set to  0.000000
12/15/2010	12:55:19 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:55:19 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:55:20 PM	Tube furnace set to 0
12/15/2010	12:56:20 PM	Helium valve closed
12/15/2010	12:56:20 PM	H2 valve closed
12/15/2010	12:56:20 PM	BCl3 valve closed
12/15/2010	12:56:20 PM	PH3 valve closed
12/15/2010	12:56:20 PM	SiCl4 pre valve closed
12/15/2010	12:56:20 PM	SiCl4 post valve closed
12/15/2010	12:56:20 PM	Bubbler valve closed
12/15/2010	12:56:20 PM	Main Vac valve opened
12/15/2010	12:56:20 PM	Bypass valve opened
12/15/2010	12:56:20 PM	Helium MFC set to  0.000000
12/15/2010	12:56:20 PM	H2 MFC set to  0.000000
12/15/2010	12:56:20 PM	BCl3 MFC set to  0.000000
12/15/2010	12:56:20 PM	PHl3 MFC set to  0.000000
12/15/2010	12:56:20 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:56:20 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:56:20 PM	Tube furnace set to 0
12/15/2010	12:57:20 PM	H2 valve closed
12/15/2010	12:57:20 PM	BCl3 valve closed
12/15/2010	12:57:20 PM	PH3 valve closed
12/15/2010	12:57:20 PM	SiCl4 pre valve closed
12/15/2010	12:57:20 PM	SiCl4 post valve closed
12/15/2010	12:57:20 PM	Bubbler valve closed
12/15/2010	12:57:20 PM	Helium valve opened
12/15/2010	12:57:20 PM	Main Vac valve opened
12/15/2010	12:57:20 PM	Bypass valve opened
12/15/2010	12:57:20 PM	Helium MFC set to  100.000000
12/15/2010	12:57:20 PM	H2 MFC set to  0.000000
12/15/2010	12:57:20 PM	BCl3 MFC set to  0.000000
12/15/2010	12:57:20 PM	PHl3 MFC set to  0.000000
12/15/2010	12:57:20 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:57:20 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:57:20 PM	Tube furnace set to 0
12/15/2010	12:58:20 PM	Helium valve closed
12/15/2010	12:58:20 PM	H2 valve closed
12/15/2010	12:58:20 PM	BCl3 valve closed
12/15/2010	12:58:20 PM	PH3 valve closed
12/15/2010	12:58:20 PM	SiCl4 pre valve closed
12/15/2010	12:58:20 PM	SiCl4 post valve closed
12/15/2010	12:58:20 PM	Bubbler valve closed
12/15/2010	12:58:20 PM	Main Vac valve opened
12/15/2010	12:58:20 PM	Bypass valve opened
12/15/2010	12:58:20 PM	Helium MFC set to  0.000000
12/15/2010	12:58:20 PM	H2 MFC set to  0.000000
12/15/2010	12:58:20 PM	BCl3 MFC set to  0.000000
12/15/2010	12:58:20 PM	PHl3 MFC set to  0.000000
12/15/2010	12:58:20 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:58:20 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:58:20 PM	Tube furnace set to 0
12/15/2010	12:59:20 PM	H2 valve closed
12/15/2010	12:59:20 PM	BCl3 valve closed
12/15/2010	12:59:20 PM	PH3 valve closed
12/15/2010	12:59:20 PM	SiCl4 pre valve closed
12/15/2010	12:59:20 PM	SiCl4 post valve closed
12/15/2010	12:59:20 PM	Bubbler valve closed
12/15/2010	12:59:20 PM	Helium valve opened
12/15/2010	12:59:20 PM	Main Vac valve opened
12/15/2010	12:59:20 PM	Bypass valve opened
12/15/2010	12:59:20 PM	Helium MFC set to  100.000000
12/15/2010	12:59:20 PM	H2 MFC set to  0.000000
12/15/2010	12:59:20 PM	BCl3 MFC set to  0.000000
12/15/2010	12:59:20 PM	PHl3 MFC set to  0.000000
12/15/2010	12:59:20 PM	SiCl4 MFC set to  0.000000
12/15/2010	12:59:20 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	12:59:20 PM	Tube furnace set to 0
12/15/2010	1:00:20 PM	Helium valve closed
12/15/2010	1:00:20 PM	H2 valve closed
12/15/2010	1:00:20 PM	BCl3 valve closed
12/15/2010	1:00:20 PM	PH3 valve closed
12/15/2010	1:00:20 PM	SiCl4 pre valve closed
12/15/2010	1:00:20 PM	SiCl4 post valve closed
12/15/2010	1:00:20 PM	Bubbler valve closed
12/15/2010	1:00:20 PM	Main Vac valve opened
12/15/2010	1:00:20 PM	Bypass valve opened
12/15/2010	1:00:20 PM	Helium MFC set to  0.000000
12/15/2010	1:00:20 PM	H2 MFC set to  0.000000
12/15/2010	1:00:20 PM	BCl3 MFC set to  0.000000
12/15/2010	1:00:20 PM	PHl3 MFC set to  0.000000
12/15/2010	1:00:20 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:00:20 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:00:21 PM	Tube furnace set to 0
12/15/2010	1:01:21 PM	H2 valve closed
12/15/2010	1:01:21 PM	BCl3 valve closed
12/15/2010	1:01:21 PM	PH3 valve closed
12/15/2010	1:01:21 PM	SiCl4 pre valve closed
12/15/2010	1:01:21 PM	SiCl4 post valve closed
12/15/2010	1:01:21 PM	Bubbler valve closed
12/15/2010	1:01:21 PM	Helium valve opened
12/15/2010	1:01:21 PM	Main Vac valve opened
12/15/2010	1:01:21 PM	Bypass valve opened
12/15/2010	1:01:21 PM	Helium MFC set to  100.000000
12/15/2010	1:01:21 PM	H2 MFC set to  0.000000
12/15/2010	1:01:21 PM	BCl3 MFC set to  0.000000
12/15/2010	1:01:21 PM	PHl3 MFC set to  0.000000
12/15/2010	1:01:21 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:01:21 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:01:21 PM	Tube furnace set to 0
12/15/2010	1:02:21 PM	Helium valve closed
12/15/2010	1:02:21 PM	H2 valve closed
12/15/2010	1:02:21 PM	BCl3 valve closed
12/15/2010	1:02:21 PM	PH3 valve closed
12/15/2010	1:02:21 PM	SiCl4 pre valve closed
12/15/2010	1:02:21 PM	SiCl4 post valve closed
12/15/2010	1:02:21 PM	Bubbler valve closed
12/15/2010	1:02:21 PM	Main Vac valve opened
12/15/2010	1:02:21 PM	Bypass valve opened
12/15/2010	1:02:21 PM	Helium MFC set to  0.000000
12/15/2010	1:02:21 PM	H2 MFC set to  0.000000
12/15/2010	1:02:21 PM	BCl3 MFC set to  0.000000
12/15/2010	1:02:21 PM	PHl3 MFC set to  0.000000
12/15/2010	1:02:21 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:02:21 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:02:21 PM	Tube furnace set to 0
12/15/2010	1:03:21 PM	H2 valve closed
12/15/2010	1:03:21 PM	BCl3 valve closed
12/15/2010	1:03:21 PM	PH3 valve closed
12/15/2010	1:03:21 PM	SiCl4 pre valve closed
12/15/2010	1:03:21 PM	SiCl4 post valve closed
12/15/2010	1:03:21 PM	Bubbler valve closed
12/15/2010	1:03:21 PM	Helium valve opened
12/15/2010	1:03:21 PM	Main Vac valve opened
12/15/2010	1:03:21 PM	Bypass valve opened
12/15/2010	1:03:21 PM	Helium MFC set to  100.000000
12/15/2010	1:03:21 PM	H2 MFC set to  0.000000
12/15/2010	1:03:21 PM	BCl3 MFC set to  0.000000
12/15/2010	1:03:21 PM	PHl3 MFC set to  0.000000
12/15/2010	1:03:21 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:03:21 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:03:21 PM	Tube furnace set to 0
12/15/2010	1:04:21 PM	Helium valve closed
12/15/2010	1:04:21 PM	H2 valve closed
12/15/2010	1:04:21 PM	BCl3 valve closed
12/15/2010	1:04:21 PM	PH3 valve closed
12/15/2010	1:04:21 PM	SiCl4 pre valve closed
12/15/2010	1:04:21 PM	SiCl4 post valve closed
12/15/2010	1:04:21 PM	Bubbler valve closed
12/15/2010	1:04:21 PM	Main Vac valve opened
12/15/2010	1:04:21 PM	Bypass valve opened
12/15/2010	1:04:21 PM	Helium MFC set to  0.000000
12/15/2010	1:04:21 PM	H2 MFC set to  0.000000
12/15/2010	1:04:21 PM	BCl3 MFC set to  0.000000
12/15/2010	1:04:21 PM	PHl3 MFC set to  0.000000
12/15/2010	1:04:21 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:04:21 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:04:21 PM	Tube furnace set to 0
12/15/2010	1:05:21 PM	H2 valve closed
12/15/2010	1:05:21 PM	BCl3 valve closed
12/15/2010	1:05:21 PM	PH3 valve closed
12/15/2010	1:05:21 PM	SiCl4 pre valve closed
12/15/2010	1:05:21 PM	SiCl4 post valve closed
12/15/2010	1:05:21 PM	Bubbler valve closed
12/15/2010	1:05:21 PM	Helium valve opened
12/15/2010	1:05:21 PM	Main Vac valve opened
12/15/2010	1:05:21 PM	Bypass valve opened
12/15/2010	1:05:21 PM	Helium MFC set to  100.000000
12/15/2010	1:05:21 PM	H2 MFC set to  0.000000
12/15/2010	1:05:21 PM	BCl3 MFC set to  0.000000
12/15/2010	1:05:21 PM	PHl3 MFC set to  0.000000
12/15/2010	1:05:21 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:05:21 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:05:22 PM	Tube furnace set to 0
12/15/2010	1:06:22 PM	Helium valve closed
12/15/2010	1:06:22 PM	H2 valve closed
12/15/2010	1:06:22 PM	BCl3 valve closed
12/15/2010	1:06:22 PM	PH3 valve closed
12/15/2010	1:06:22 PM	SiCl4 pre valve closed
12/15/2010	1:06:22 PM	SiCl4 post valve closed
12/15/2010	1:06:22 PM	Bubbler valve closed
12/15/2010	1:06:22 PM	Main Vac valve opened
12/15/2010	1:06:22 PM	Bypass valve opened
12/15/2010	1:06:22 PM	Helium MFC set to  0.000000
12/15/2010	1:06:22 PM	H2 MFC set to  0.000000
12/15/2010	1:06:22 PM	BCl3 MFC set to  0.000000
12/15/2010	1:06:22 PM	PHl3 MFC set to  0.000000
12/15/2010	1:06:22 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:06:22 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:06:22 PM	Tube furnace set to 0
12/15/2010	1:07:22 PM	H2 valve closed
12/15/2010	1:07:22 PM	BCl3 valve closed
12/15/2010	1:07:22 PM	PH3 valve closed
12/15/2010	1:07:22 PM	SiCl4 pre valve closed
12/15/2010	1:07:22 PM	SiCl4 post valve closed
12/15/2010	1:07:22 PM	Bubbler valve closed
12/15/2010	1:07:22 PM	Helium valve opened
12/15/2010	1:07:22 PM	Main Vac valve opened
12/15/2010	1:07:22 PM	Bypass valve opened
12/15/2010	1:07:22 PM	Helium MFC set to  100.000000
12/15/2010	1:07:22 PM	H2 MFC set to  0.000000
12/15/2010	1:07:22 PM	BCl3 MFC set to  0.000000
12/15/2010	1:07:22 PM	PHl3 MFC set to  0.000000
12/15/2010	1:07:22 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:07:22 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:07:22 PM	Tube furnace set to 0
12/15/2010	1:08:22 PM	Helium valve closed
12/15/2010	1:08:22 PM	H2 valve closed
12/15/2010	1:08:22 PM	BCl3 valve closed
12/15/2010	1:08:22 PM	PH3 valve closed
12/15/2010	1:08:22 PM	SiCl4 pre valve closed
12/15/2010	1:08:22 PM	SiCl4 post valve closed
12/15/2010	1:08:22 PM	Bubbler valve closed
12/15/2010	1:08:22 PM	Main Vac valve opened
12/15/2010	1:08:22 PM	Bypass valve opened
12/15/2010	1:08:22 PM	Helium MFC set to  0.000000
12/15/2010	1:08:22 PM	H2 MFC set to  0.000000
12/15/2010	1:08:22 PM	BCl3 MFC set to  0.000000
12/15/2010	1:08:22 PM	PHl3 MFC set to  0.000000
12/15/2010	1:08:22 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:08:22 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:08:22 PM	Tube furnace set to 0
12/15/2010	1:08:23 PM	Run finished at 1:08 PM
12/15/2010	1:08:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/15/2010	1:25:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/15/2010	1:25:00 PM	Recipe started at 1:25 PM
12/15/2010	1:25:00 PM	Helium valve closed
12/15/2010	1:25:00 PM	H2 valve closed
12/15/2010	1:25:00 PM	BCl3 valve closed
12/15/2010	1:25:00 PM	PH3 valve closed
12/15/2010	1:25:00 PM	SiCl4 pre valve closed
12/15/2010	1:25:00 PM	SiCl4 post valve closed
12/15/2010	1:25:00 PM	Main Vac valve closed
12/15/2010	1:25:00 PM	Bypass valve closed
12/15/2010	1:25:00 PM	Bubbler valve closed
12/15/2010	1:25:00 PM	Helium MFC set to  0.000000
12/15/2010	1:25:00 PM	H2 MFC set to  0.000000
12/15/2010	1:25:00 PM	BCl3 MFC set to  0.000000
12/15/2010	1:25:00 PM	PHl3 MFC set to  0.000000
12/15/2010	1:25:00 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:25:00 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:25:00 PM	Tube furnace set to 0
12/15/2010	1:25:00 PM	Run finished at 1:25 PM
12/15/2010	1:25:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/15/2010	1:25:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/15/2010	1:25:29 PM	Recipe started at 1:25 PM
12/15/2010	1:25:29 PM	Helium valve closed
12/15/2010	1:25:29 PM	H2 valve closed
12/15/2010	1:25:29 PM	BCl3 valve closed
12/15/2010	1:25:29 PM	PH3 valve closed
12/15/2010	1:25:29 PM	SiCl4 pre valve closed
12/15/2010	1:25:29 PM	SiCl4 post valve closed
12/15/2010	1:25:29 PM	Main Vac valve closed
12/15/2010	1:25:29 PM	Bubbler valve closed
12/15/2010	1:25:29 PM	Bypass valve opened
12/15/2010	1:25:29 PM	Helium MFC set to  0.000000
12/15/2010	1:25:29 PM	H2 MFC set to  0.000000
12/15/2010	1:25:29 PM	BCl3 MFC set to  0.000000
12/15/2010	1:25:29 PM	PHl3 MFC set to  0.000000
12/15/2010	1:25:29 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:25:29 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:25:29 PM	Tube furnace set to 0
12/15/2010	1:25:29 PM	Helium valve closed
12/15/2010	1:25:29 PM	H2 valve closed
12/15/2010	1:25:29 PM	BCl3 valve closed
12/15/2010	1:25:29 PM	PH3 valve closed
12/15/2010	1:25:29 PM	SiCl4 pre valve closed
12/15/2010	1:25:29 PM	SiCl4 post valve closed
12/15/2010	1:25:29 PM	Bubbler valve closed
12/15/2010	1:25:29 PM	Main Vac valve opened
12/15/2010	1:25:29 PM	Bypass valve opened
12/15/2010	1:25:29 PM	Helium MFC set to  0.000000
12/15/2010	1:25:29 PM	H2 MFC set to  0.000000
12/15/2010	1:25:29 PM	BCl3 MFC set to  0.000000
12/15/2010	1:25:29 PM	PHl3 MFC set to  0.000000
12/15/2010	1:25:29 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:25:29 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:25:30 PM	Tube furnace set to 0
12/15/2010	1:25:30 PM	Run finished at 1:25 PM
12/15/2010	1:25:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/15/2010	1:26:22 PM	Recipe started at 1:26 PM
12/15/2010	1:26:22 PM	Helium valve closed
12/15/2010	1:26:22 PM	BCl3 valve closed
12/15/2010	1:26:22 PM	PH3 valve closed
12/15/2010	1:26:22 PM	SiCl4 pre valve closed
12/15/2010	1:26:22 PM	SiCl4 post valve closed
12/15/2010	1:26:22 PM	Main Vac valve closed
12/15/2010	1:26:22 PM	Bypass valve closed
12/15/2010	1:26:22 PM	Bubbler valve closed
12/15/2010	1:26:22 PM	H2 valve opened
12/15/2010	1:26:22 PM	Helium MFC set to  0.000000
12/15/2010	1:26:22 PM	H2 MFC set to  500.000000
12/15/2010	1:26:22 PM	BCl3 MFC set to  0.000000
12/15/2010	1:26:22 PM	PHl3 MFC set to  0.000000
12/15/2010	1:26:22 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:26:22 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:26:22 PM	Tube furnace set to 100
12/15/2010	1:27:40 PM	Helium valve closed
12/15/2010	1:27:40 PM	BCl3 valve closed
12/15/2010	1:27:40 PM	PH3 valve closed
12/15/2010	1:27:40 PM	SiCl4 pre valve closed
12/15/2010	1:27:40 PM	SiCl4 post valve closed
12/15/2010	1:27:40 PM	Main Vac valve closed
12/15/2010	1:27:40 PM	Bypass valve closed
12/15/2010	1:27:40 PM	H2 valve opened
12/15/2010	1:27:40 PM	Bubbler valve opened
12/15/2010	1:27:40 PM	Helium MFC set to  0.000000
12/15/2010	1:27:40 PM	H2 MFC set to  500.000000
12/15/2010	1:27:40 PM	BCl3 MFC set to  0.000000
12/15/2010	1:27:40 PM	PHl3 MFC set to  0.000000
12/15/2010	1:27:40 PM	SiCl4 MFC set to  0.000000
12/15/2010	1:27:40 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:27:41 PM	Tube furnace set to 1000
12/15/2010	1:47:40 PM	Helium valve closed
12/15/2010	1:47:40 PM	PH3 valve closed
12/15/2010	1:47:40 PM	Main Vac valve closed
12/15/2010	1:47:40 PM	Bypass valve closed
12/15/2010	1:47:40 PM	H2 valve opened
12/15/2010	1:47:40 PM	BCl3 valve opened
12/15/2010	1:47:40 PM	SiCl4 pre valve opened
12/15/2010	1:47:40 PM	SiCl4 post valve opened
12/15/2010	1:47:40 PM	Bubbler valve opened
12/15/2010	1:47:40 PM	Helium MFC set to  0.000000
12/15/2010	1:47:41 PM	H2 MFC set to  500.000000
12/15/2010	1:47:41 PM	BCl3 MFC set to  10.000000
12/15/2010	1:47:41 PM	PHl3 MFC set to  0.000000
12/15/2010	1:47:41 PM	SiCl4 MFC set to  50.000000
12/15/2010	1:47:41 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	1:47:41 PM	Tube furnace set to 1000
12/15/2010	2:02:41 PM	H2 valve closed
12/15/2010	2:02:41 PM	BCl3 valve closed
12/15/2010	2:02:41 PM	PH3 valve closed
12/15/2010	2:02:41 PM	SiCl4 pre valve closed
12/15/2010	2:02:41 PM	SiCl4 post valve closed
12/15/2010	2:02:41 PM	Main Vac valve closed
12/15/2010	2:02:41 PM	Bypass valve closed
12/15/2010	2:02:41 PM	Helium valve opened
12/15/2010	2:02:41 PM	Bubbler valve opened
12/15/2010	2:02:41 PM	Helium MFC set to  500.000000
12/15/2010	2:02:41 PM	H2 MFC set to  0.000000
12/15/2010	2:02:41 PM	BCl3 MFC set to  0.000000
12/15/2010	2:02:41 PM	PHl3 MFC set to  0.000000
12/15/2010	2:02:41 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:02:41 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:02:41 PM	Tube furnace set to 0
12/15/2010	2:22:41 PM	Helium valve closed
12/15/2010	2:22:41 PM	H2 valve closed
12/15/2010	2:22:41 PM	BCl3 valve closed
12/15/2010	2:22:41 PM	PH3 valve closed
12/15/2010	2:22:41 PM	SiCl4 pre valve closed
12/15/2010	2:22:41 PM	SiCl4 post valve closed
12/15/2010	2:22:41 PM	Main Vac valve closed
12/15/2010	2:22:41 PM	Bypass valve closed
12/15/2010	2:22:41 PM	Bubbler valve closed
12/15/2010	2:22:41 PM	Helium MFC set to  0.000000
12/15/2010	2:22:41 PM	H2 MFC set to  0.000000
12/15/2010	2:22:41 PM	BCl3 MFC set to  0.000000
12/15/2010	2:22:41 PM	PHl3 MFC set to  0.000000
12/15/2010	2:22:41 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:22:41 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:22:41 PM	Tube furnace set to 0
12/15/2010	2:22:41 PM	Run finished at 2:22 PM
12/15/2010	2:39:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/15/2010	2:39:08 PM	Recipe started at 2:39 PM
12/15/2010	2:39:08 PM	H2 valve closed
12/15/2010	2:39:08 PM	BCl3 valve closed
12/15/2010	2:39:08 PM	PH3 valve closed
12/15/2010	2:39:08 PM	SiCl4 pre valve closed
12/15/2010	2:39:08 PM	SiCl4 post valve closed
12/15/2010	2:39:08 PM	Main Vac valve closed
12/15/2010	2:39:08 PM	Bypass valve closed
12/15/2010	2:39:08 PM	Bubbler valve closed
12/15/2010	2:39:08 PM	Helium valve opened
12/15/2010	2:39:08 PM	Helium MFC set to  500.000000
12/15/2010	2:39:08 PM	H2 MFC set to  0.000000
12/15/2010	2:39:08 PM	BCl3 MFC set to  0.000000
12/15/2010	2:39:08 PM	PHl3 MFC set to  0.000000
12/15/2010	2:39:08 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:39:08 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:39:08 PM	Tube furnace set to 0
12/15/2010	2:39:15 PM	Helium valve closed
12/15/2010	2:39:15 PM	H2 valve closed
12/15/2010	2:39:15 PM	BCl3 valve closed
12/15/2010	2:39:15 PM	PH3 valve closed
12/15/2010	2:39:15 PM	SiCl4 pre valve closed
12/15/2010	2:39:15 PM	SiCl4 post valve closed
12/15/2010	2:39:15 PM	Main Vac valve closed
12/15/2010	2:39:15 PM	Bypass valve closed
12/15/2010	2:39:15 PM	Bubbler valve closed
12/15/2010	2:39:15 PM	Helium MFC set to  0.000000
12/15/2010	2:39:15 PM	H2 MFC set to  0.000000
12/15/2010	2:39:15 PM	BCl3 MFC set to  0.000000
12/15/2010	2:39:15 PM	PHl3 MFC set to  0.000000
12/15/2010	2:39:15 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:39:15 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:39:15 PM	Tube furnace set to 0
12/15/2010	2:39:16 PM	Run finished at 2:39 PM
12/15/2010	2:39:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/15/2010	2:48:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/15/2010	2:48:16 PM	Recipe started at 2:48 PM
12/15/2010	2:48:16 PM	Helium valve closed
12/15/2010	2:48:16 PM	H2 valve closed
12/15/2010	2:48:16 PM	BCl3 valve closed
12/15/2010	2:48:16 PM	PH3 valve closed
12/15/2010	2:48:16 PM	SiCl4 pre valve closed
12/15/2010	2:48:16 PM	SiCl4 post valve closed
12/15/2010	2:48:16 PM	Main Vac valve closed
12/15/2010	2:48:16 PM	Bubbler valve closed
12/15/2010	2:48:16 PM	Bypass valve opened
12/15/2010	2:48:16 PM	Helium MFC set to  0.000000
12/15/2010	2:48:16 PM	H2 MFC set to  0.000000
12/15/2010	2:48:16 PM	BCl3 MFC set to  0.000000
12/15/2010	2:48:16 PM	PHl3 MFC set to  0.000000
12/15/2010	2:48:16 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:48:16 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:48:16 PM	Tube furnace set to 0
12/15/2010	2:49:14 PM	Helium valve closed
12/15/2010	2:49:14 PM	H2 valve closed
12/15/2010	2:49:14 PM	BCl3 valve closed
12/15/2010	2:49:14 PM	PH3 valve closed
12/15/2010	2:49:14 PM	SiCl4 pre valve closed
12/15/2010	2:49:14 PM	SiCl4 post valve closed
12/15/2010	2:49:14 PM	Bubbler valve closed
12/15/2010	2:49:14 PM	Main Vac valve opened
12/15/2010	2:49:14 PM	Bypass valve opened
12/15/2010	2:49:14 PM	Helium MFC set to  0.000000
12/15/2010	2:49:14 PM	H2 MFC set to  0.000000
12/15/2010	2:49:14 PM	BCl3 MFC set to  0.000000
12/15/2010	2:49:14 PM	PHl3 MFC set to  0.000000
12/15/2010	2:49:14 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:49:14 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:49:15 PM	Tube furnace set to 0
12/15/2010	2:50:15 PM	H2 valve closed
12/15/2010	2:50:15 PM	BCl3 valve closed
12/15/2010	2:50:15 PM	PH3 valve closed
12/15/2010	2:50:15 PM	SiCl4 pre valve closed
12/15/2010	2:50:15 PM	SiCl4 post valve closed
12/15/2010	2:50:15 PM	Bubbler valve closed
12/15/2010	2:50:15 PM	Helium valve opened
12/15/2010	2:50:15 PM	Main Vac valve opened
12/15/2010	2:50:15 PM	Bypass valve opened
12/15/2010	2:50:15 PM	Helium MFC set to  100.000000
12/15/2010	2:50:15 PM	H2 MFC set to  0.000000
12/15/2010	2:50:15 PM	BCl3 MFC set to  0.000000
12/15/2010	2:50:15 PM	PHl3 MFC set to  0.000000
12/15/2010	2:50:15 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:50:15 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:50:15 PM	Tube furnace set to 0
12/15/2010	2:51:15 PM	Helium valve closed
12/15/2010	2:51:15 PM	H2 valve closed
12/15/2010	2:51:15 PM	BCl3 valve closed
12/15/2010	2:51:15 PM	PH3 valve closed
12/15/2010	2:51:15 PM	SiCl4 pre valve closed
12/15/2010	2:51:15 PM	SiCl4 post valve closed
12/15/2010	2:51:15 PM	Bubbler valve closed
12/15/2010	2:51:15 PM	Main Vac valve opened
12/15/2010	2:51:15 PM	Bypass valve opened
12/15/2010	2:51:15 PM	Helium MFC set to  0.000000
12/15/2010	2:51:15 PM	H2 MFC set to  0.000000
12/15/2010	2:51:15 PM	BCl3 MFC set to  0.000000
12/15/2010	2:51:15 PM	PHl3 MFC set to  0.000000
12/15/2010	2:51:15 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:51:15 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:51:15 PM	Tube furnace set to 0
12/15/2010	2:52:15 PM	H2 valve closed
12/15/2010	2:52:15 PM	BCl3 valve closed
12/15/2010	2:52:15 PM	PH3 valve closed
12/15/2010	2:52:15 PM	SiCl4 pre valve closed
12/15/2010	2:52:15 PM	SiCl4 post valve closed
12/15/2010	2:52:15 PM	Bubbler valve closed
12/15/2010	2:52:15 PM	Helium valve opened
12/15/2010	2:52:15 PM	Main Vac valve opened
12/15/2010	2:52:15 PM	Bypass valve opened
12/15/2010	2:52:15 PM	Helium MFC set to  100.000000
12/15/2010	2:52:15 PM	H2 MFC set to  0.000000
12/15/2010	2:52:15 PM	BCl3 MFC set to  0.000000
12/15/2010	2:52:15 PM	PHl3 MFC set to  0.000000
12/15/2010	2:52:15 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:52:15 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:52:15 PM	Tube furnace set to 0
12/15/2010	2:53:15 PM	Helium valve closed
12/15/2010	2:53:15 PM	H2 valve closed
12/15/2010	2:53:15 PM	BCl3 valve closed
12/15/2010	2:53:15 PM	PH3 valve closed
12/15/2010	2:53:15 PM	SiCl4 pre valve closed
12/15/2010	2:53:15 PM	SiCl4 post valve closed
12/15/2010	2:53:15 PM	Bubbler valve closed
12/15/2010	2:53:15 PM	Main Vac valve opened
12/15/2010	2:53:15 PM	Bypass valve opened
12/15/2010	2:53:15 PM	Helium MFC set to  0.000000
12/15/2010	2:53:15 PM	H2 MFC set to  0.000000
12/15/2010	2:53:15 PM	BCl3 MFC set to  0.000000
12/15/2010	2:53:15 PM	PHl3 MFC set to  0.000000
12/15/2010	2:53:15 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:53:15 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:53:15 PM	Tube furnace set to 0
12/15/2010	2:54:15 PM	H2 valve closed
12/15/2010	2:54:15 PM	BCl3 valve closed
12/15/2010	2:54:15 PM	PH3 valve closed
12/15/2010	2:54:15 PM	SiCl4 pre valve closed
12/15/2010	2:54:15 PM	SiCl4 post valve closed
12/15/2010	2:54:15 PM	Bubbler valve closed
12/15/2010	2:54:15 PM	Helium valve opened
12/15/2010	2:54:15 PM	Main Vac valve opened
12/15/2010	2:54:15 PM	Bypass valve opened
12/15/2010	2:54:15 PM	Helium MFC set to  100.000000
12/15/2010	2:54:15 PM	H2 MFC set to  0.000000
12/15/2010	2:54:15 PM	BCl3 MFC set to  0.000000
12/15/2010	2:54:15 PM	PHl3 MFC set to  0.000000
12/15/2010	2:54:15 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:54:15 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:54:16 PM	Tube furnace set to 0
12/15/2010	2:55:16 PM	Helium valve closed
12/15/2010	2:55:16 PM	H2 valve closed
12/15/2010	2:55:16 PM	BCl3 valve closed
12/15/2010	2:55:16 PM	PH3 valve closed
12/15/2010	2:55:16 PM	SiCl4 pre valve closed
12/15/2010	2:55:16 PM	SiCl4 post valve closed
12/15/2010	2:55:16 PM	Bubbler valve closed
12/15/2010	2:55:16 PM	Main Vac valve opened
12/15/2010	2:55:16 PM	Bypass valve opened
12/15/2010	2:55:16 PM	Helium MFC set to  0.000000
12/15/2010	2:55:16 PM	H2 MFC set to  0.000000
12/15/2010	2:55:16 PM	BCl3 MFC set to  0.000000
12/15/2010	2:55:16 PM	PHl3 MFC set to  0.000000
12/15/2010	2:55:16 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:55:16 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:55:16 PM	Tube furnace set to 0
12/15/2010	2:56:16 PM	H2 valve closed
12/15/2010	2:56:16 PM	BCl3 valve closed
12/15/2010	2:56:16 PM	PH3 valve closed
12/15/2010	2:56:16 PM	SiCl4 pre valve closed
12/15/2010	2:56:16 PM	SiCl4 post valve closed
12/15/2010	2:56:16 PM	Bubbler valve closed
12/15/2010	2:56:16 PM	Helium valve opened
12/15/2010	2:56:16 PM	Main Vac valve opened
12/15/2010	2:56:16 PM	Bypass valve opened
12/15/2010	2:56:16 PM	Helium MFC set to  100.000000
12/15/2010	2:56:16 PM	H2 MFC set to  0.000000
12/15/2010	2:56:16 PM	BCl3 MFC set to  0.000000
12/15/2010	2:56:16 PM	PHl3 MFC set to  0.000000
12/15/2010	2:56:16 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:56:16 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:56:16 PM	Tube furnace set to 0
12/15/2010	2:57:16 PM	Helium valve closed
12/15/2010	2:57:16 PM	H2 valve closed
12/15/2010	2:57:16 PM	BCl3 valve closed
12/15/2010	2:57:16 PM	PH3 valve closed
12/15/2010	2:57:16 PM	SiCl4 pre valve closed
12/15/2010	2:57:16 PM	SiCl4 post valve closed
12/15/2010	2:57:16 PM	Bubbler valve closed
12/15/2010	2:57:16 PM	Main Vac valve opened
12/15/2010	2:57:16 PM	Bypass valve opened
12/15/2010	2:57:16 PM	Helium MFC set to  0.000000
12/15/2010	2:57:16 PM	H2 MFC set to  0.000000
12/15/2010	2:57:16 PM	BCl3 MFC set to  0.000000
12/15/2010	2:57:16 PM	PHl3 MFC set to  0.000000
12/15/2010	2:57:16 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:57:16 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:57:16 PM	Tube furnace set to 0
12/15/2010	2:58:16 PM	H2 valve closed
12/15/2010	2:58:16 PM	BCl3 valve closed
12/15/2010	2:58:16 PM	PH3 valve closed
12/15/2010	2:58:16 PM	SiCl4 pre valve closed
12/15/2010	2:58:16 PM	SiCl4 post valve closed
12/15/2010	2:58:16 PM	Bubbler valve closed
12/15/2010	2:58:16 PM	Helium valve opened
12/15/2010	2:58:16 PM	Main Vac valve opened
12/15/2010	2:58:16 PM	Bypass valve opened
12/15/2010	2:58:16 PM	Helium MFC set to  100.000000
12/15/2010	2:58:16 PM	H2 MFC set to  0.000000
12/15/2010	2:58:16 PM	BCl3 MFC set to  0.000000
12/15/2010	2:58:16 PM	PHl3 MFC set to  0.000000
12/15/2010	2:58:16 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:58:16 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:58:16 PM	Tube furnace set to 0
12/15/2010	2:59:16 PM	Helium valve closed
12/15/2010	2:59:16 PM	H2 valve closed
12/15/2010	2:59:16 PM	BCl3 valve closed
12/15/2010	2:59:16 PM	PH3 valve closed
12/15/2010	2:59:16 PM	SiCl4 pre valve closed
12/15/2010	2:59:16 PM	SiCl4 post valve closed
12/15/2010	2:59:16 PM	Bubbler valve closed
12/15/2010	2:59:16 PM	Main Vac valve opened
12/15/2010	2:59:16 PM	Bypass valve opened
12/15/2010	2:59:16 PM	Helium MFC set to  0.000000
12/15/2010	2:59:16 PM	H2 MFC set to  0.000000
12/15/2010	2:59:16 PM	BCl3 MFC set to  0.000000
12/15/2010	2:59:16 PM	PHl3 MFC set to  0.000000
12/15/2010	2:59:16 PM	SiCl4 MFC set to  0.000000
12/15/2010	2:59:16 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	2:59:17 PM	Tube furnace set to 0
12/15/2010	3:00:17 PM	H2 valve closed
12/15/2010	3:00:17 PM	BCl3 valve closed
12/15/2010	3:00:17 PM	PH3 valve closed
12/15/2010	3:00:17 PM	SiCl4 pre valve closed
12/15/2010	3:00:17 PM	SiCl4 post valve closed
12/15/2010	3:00:17 PM	Bubbler valve closed
12/15/2010	3:00:17 PM	Helium valve opened
12/15/2010	3:00:17 PM	Main Vac valve opened
12/15/2010	3:00:17 PM	Bypass valve opened
12/15/2010	3:00:17 PM	Helium MFC set to  100.000000
12/15/2010	3:00:17 PM	H2 MFC set to  0.000000
12/15/2010	3:00:17 PM	BCl3 MFC set to  0.000000
12/15/2010	3:00:17 PM	PHl3 MFC set to  0.000000
12/15/2010	3:00:17 PM	SiCl4 MFC set to  0.000000
12/15/2010	3:00:17 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	3:00:17 PM	Tube furnace set to 0
12/15/2010	3:01:17 PM	Helium valve closed
12/15/2010	3:01:17 PM	H2 valve closed
12/15/2010	3:01:17 PM	BCl3 valve closed
12/15/2010	3:01:17 PM	PH3 valve closed
12/15/2010	3:01:17 PM	SiCl4 pre valve closed
12/15/2010	3:01:17 PM	SiCl4 post valve closed
12/15/2010	3:01:17 PM	Bubbler valve closed
12/15/2010	3:01:17 PM	Main Vac valve opened
12/15/2010	3:01:17 PM	Bypass valve opened
12/15/2010	3:01:17 PM	Helium MFC set to  0.000000
12/15/2010	3:01:17 PM	H2 MFC set to  0.000000
12/15/2010	3:01:17 PM	BCl3 MFC set to  0.000000
12/15/2010	3:01:17 PM	PHl3 MFC set to  0.000000
12/15/2010	3:01:17 PM	SiCl4 MFC set to  0.000000
12/15/2010	3:01:17 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	3:01:17 PM	Tube furnace set to 0
12/15/2010	3:02:17 PM	H2 valve closed
12/15/2010	3:02:17 PM	BCl3 valve closed
12/15/2010	3:02:17 PM	PH3 valve closed
12/15/2010	3:02:17 PM	SiCl4 pre valve closed
12/15/2010	3:02:17 PM	SiCl4 post valve closed
12/15/2010	3:02:17 PM	Bubbler valve closed
12/15/2010	3:02:17 PM	Helium valve opened
12/15/2010	3:02:17 PM	Main Vac valve opened
12/15/2010	3:02:17 PM	Bypass valve opened
12/15/2010	3:02:17 PM	Helium MFC set to  100.000000
12/15/2010	3:02:17 PM	H2 MFC set to  0.000000
12/15/2010	3:02:17 PM	BCl3 MFC set to  0.000000
12/15/2010	3:02:17 PM	PHl3 MFC set to  0.000000
12/15/2010	3:02:17 PM	SiCl4 MFC set to  0.000000
12/15/2010	3:02:17 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	3:02:17 PM	Tube furnace set to 0
12/15/2010	3:03:17 PM	Helium valve closed
12/15/2010	3:03:17 PM	H2 valve closed
12/15/2010	3:03:17 PM	BCl3 valve closed
12/15/2010	3:03:17 PM	PH3 valve closed
12/15/2010	3:03:17 PM	SiCl4 pre valve closed
12/15/2010	3:03:17 PM	SiCl4 post valve closed
12/15/2010	3:03:17 PM	Bubbler valve closed
12/15/2010	3:03:17 PM	Main Vac valve opened
12/15/2010	3:03:17 PM	Bypass valve opened
12/15/2010	3:03:17 PM	Helium MFC set to  0.000000
12/15/2010	3:03:17 PM	H2 MFC set to  0.000000
12/15/2010	3:03:17 PM	BCl3 MFC set to  0.000000
12/15/2010	3:03:17 PM	PHl3 MFC set to  0.000000
12/15/2010	3:03:17 PM	SiCl4 MFC set to  0.000000
12/15/2010	3:03:17 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	3:03:17 PM	Tube furnace set to 0
12/15/2010	3:04:17 PM	H2 valve closed
12/15/2010	3:04:17 PM	BCl3 valve closed
12/15/2010	3:04:17 PM	PH3 valve closed
12/15/2010	3:04:17 PM	SiCl4 pre valve closed
12/15/2010	3:04:17 PM	SiCl4 post valve closed
12/15/2010	3:04:17 PM	Bubbler valve closed
12/15/2010	3:04:17 PM	Helium valve opened
12/15/2010	3:04:17 PM	Main Vac valve opened
12/15/2010	3:04:17 PM	Bypass valve opened
12/15/2010	3:04:17 PM	Helium MFC set to  100.000000
12/15/2010	3:04:17 PM	H2 MFC set to  0.000000
12/15/2010	3:04:17 PM	BCl3 MFC set to  0.000000
12/15/2010	3:04:17 PM	PHl3 MFC set to  0.000000
12/15/2010	3:04:17 PM	SiCl4 MFC set to  0.000000
12/15/2010	3:04:17 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	3:04:18 PM	Tube furnace set to 0
12/15/2010	3:05:18 PM	Helium valve closed
12/15/2010	3:05:18 PM	H2 valve closed
12/15/2010	3:05:18 PM	BCl3 valve closed
12/15/2010	3:05:18 PM	PH3 valve closed
12/15/2010	3:05:18 PM	SiCl4 pre valve closed
12/15/2010	3:05:18 PM	SiCl4 post valve closed
12/15/2010	3:05:18 PM	Bubbler valve closed
12/15/2010	3:05:18 PM	Main Vac valve opened
12/15/2010	3:05:18 PM	Bypass valve opened
12/15/2010	3:05:18 PM	Helium MFC set to  0.000000
12/15/2010	3:05:18 PM	H2 MFC set to  0.000000
12/15/2010	3:05:18 PM	BCl3 MFC set to  0.000000
12/15/2010	3:05:18 PM	PHl3 MFC set to  0.000000
12/15/2010	3:05:18 PM	SiCl4 MFC set to  0.000000
12/15/2010	3:05:18 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	3:05:18 PM	Tube furnace set to 0
12/15/2010	3:06:18 PM	H2 valve closed
12/15/2010	3:06:18 PM	BCl3 valve closed
12/15/2010	3:06:18 PM	PH3 valve closed
12/15/2010	3:06:18 PM	SiCl4 pre valve closed
12/15/2010	3:06:18 PM	SiCl4 post valve closed
12/15/2010	3:06:18 PM	Bubbler valve closed
12/15/2010	3:06:18 PM	Helium valve opened
12/15/2010	3:06:18 PM	Main Vac valve opened
12/15/2010	3:06:18 PM	Bypass valve opened
12/15/2010	3:06:18 PM	Helium MFC set to  100.000000
12/15/2010	3:06:18 PM	H2 MFC set to  0.000000
12/15/2010	3:06:18 PM	BCl3 MFC set to  0.000000
12/15/2010	3:06:18 PM	PHl3 MFC set to  0.000000
12/15/2010	3:06:18 PM	SiCl4 MFC set to  0.000000
12/15/2010	3:06:18 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	3:06:18 PM	Tube furnace set to 0
12/15/2010	3:07:18 PM	Helium valve closed
12/15/2010	3:07:18 PM	H2 valve closed
12/15/2010	3:07:18 PM	BCl3 valve closed
12/15/2010	3:07:18 PM	PH3 valve closed
12/15/2010	3:07:18 PM	SiCl4 pre valve closed
12/15/2010	3:07:18 PM	SiCl4 post valve closed
12/15/2010	3:07:18 PM	Bubbler valve closed
12/15/2010	3:07:18 PM	Main Vac valve opened
12/15/2010	3:07:18 PM	Bypass valve opened
12/15/2010	3:07:18 PM	Helium MFC set to  0.000000
12/15/2010	3:07:18 PM	H2 MFC set to  0.000000
12/15/2010	3:07:18 PM	BCl3 MFC set to  0.000000
12/15/2010	3:07:18 PM	PHl3 MFC set to  0.000000
12/15/2010	3:07:18 PM	SiCl4 MFC set to  0.000000
12/15/2010	3:07:18 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	3:07:18 PM	Tube furnace set to 0
12/15/2010	3:08:18 PM	H2 valve closed
12/15/2010	3:08:18 PM	BCl3 valve closed
12/15/2010	3:08:18 PM	PH3 valve closed
12/15/2010	3:08:18 PM	SiCl4 pre valve closed
12/15/2010	3:08:18 PM	SiCl4 post valve closed
12/15/2010	3:08:18 PM	Bubbler valve closed
12/15/2010	3:08:18 PM	Helium valve opened
12/15/2010	3:08:18 PM	Main Vac valve opened
12/15/2010	3:08:18 PM	Bypass valve opened
12/15/2010	3:08:18 PM	Helium MFC set to  100.000000
12/15/2010	3:08:18 PM	H2 MFC set to  0.000000
12/15/2010	3:08:18 PM	BCl3 MFC set to  0.000000
12/15/2010	3:08:18 PM	PHl3 MFC set to  0.000000
12/15/2010	3:08:18 PM	SiCl4 MFC set to  0.000000
12/15/2010	3:08:18 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	3:08:18 PM	Tube furnace set to 0
12/15/2010	3:09:18 PM	Helium valve closed
12/15/2010	3:09:18 PM	H2 valve closed
12/15/2010	3:09:18 PM	BCl3 valve closed
12/15/2010	3:09:18 PM	PH3 valve closed
12/15/2010	3:09:18 PM	SiCl4 pre valve closed
12/15/2010	3:09:18 PM	SiCl4 post valve closed
12/15/2010	3:09:18 PM	Bubbler valve closed
12/15/2010	3:09:18 PM	Main Vac valve opened
12/15/2010	3:09:18 PM	Bypass valve opened
12/15/2010	3:09:18 PM	Helium MFC set to  0.000000
12/15/2010	3:09:18 PM	H2 MFC set to  0.000000
12/15/2010	3:09:18 PM	BCl3 MFC set to  0.000000
12/15/2010	3:09:18 PM	PHl3 MFC set to  0.000000
12/15/2010	3:09:18 PM	SiCl4 MFC set to  0.000000
12/15/2010	3:09:18 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	3:09:19 PM	Tube furnace set to 0
12/15/2010	3:09:20 PM	Run finished at 3:09 PM
12/15/2010	3:09:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/15/2010	4:16:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/15/2010	4:16:48 PM	Recipe started at 4:16 PM
12/15/2010	4:16:48 PM	Helium valve closed
12/15/2010	4:16:48 PM	H2 valve closed
12/15/2010	4:16:48 PM	BCl3 valve closed
12/15/2010	4:16:48 PM	PH3 valve closed
12/15/2010	4:16:48 PM	SiCl4 pre valve closed
12/15/2010	4:16:48 PM	SiCl4 post valve closed
12/15/2010	4:16:48 PM	Main Vac valve closed
12/15/2010	4:16:48 PM	Bypass valve closed
12/15/2010	4:16:48 PM	Bubbler valve closed
12/15/2010	4:16:48 PM	Helium MFC set to  0.000000
12/15/2010	4:16:48 PM	H2 MFC set to  0.000000
12/15/2010	4:16:48 PM	BCl3 MFC set to  0.000000
12/15/2010	4:16:48 PM	PHl3 MFC set to  0.000000
12/15/2010	4:16:48 PM	SiCl4 MFC set to  0.000000
12/15/2010	4:16:48 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	4:16:48 PM	Tube furnace set to 0
12/15/2010	4:16:48 PM	Run finished at 4:16 PM
12/15/2010	4:16:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/15/2010	4:17:15 PM	Recipe started at 4:17 PM
12/15/2010	4:17:15 PM	Helium valve closed
12/15/2010	4:17:15 PM	BCl3 valve closed
12/15/2010	4:17:15 PM	PH3 valve closed
12/15/2010	4:17:15 PM	SiCl4 pre valve closed
12/15/2010	4:17:15 PM	SiCl4 post valve closed
12/15/2010	4:17:15 PM	Main Vac valve closed
12/15/2010	4:17:15 PM	Bypass valve closed
12/15/2010	4:17:15 PM	Bubbler valve closed
12/15/2010	4:17:15 PM	H2 valve opened
12/15/2010	4:17:15 PM	Helium MFC set to  0.000000
12/15/2010	4:17:15 PM	H2 MFC set to  500.000000
12/15/2010	4:17:15 PM	BCl3 MFC set to  0.000000
12/15/2010	4:17:15 PM	PHl3 MFC set to  0.000000
12/15/2010	4:17:15 PM	SiCl4 MFC set to  0.000000
12/15/2010	4:17:15 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	4:17:15 PM	Tube furnace set to 100
12/15/2010	4:18:34 PM	Helium valve closed
12/15/2010	4:18:34 PM	BCl3 valve closed
12/15/2010	4:18:34 PM	PH3 valve closed
12/15/2010	4:18:34 PM	SiCl4 pre valve closed
12/15/2010	4:18:34 PM	SiCl4 post valve closed
12/15/2010	4:18:34 PM	Main Vac valve closed
12/15/2010	4:18:34 PM	Bypass valve closed
12/15/2010	4:18:34 PM	H2 valve opened
12/15/2010	4:18:34 PM	Bubbler valve opened
12/15/2010	4:18:34 PM	Helium MFC set to  0.000000
12/15/2010	4:18:34 PM	H2 MFC set to  500.000000
12/15/2010	4:18:34 PM	BCl3 MFC set to  0.000000
12/15/2010	4:18:34 PM	PHl3 MFC set to  0.000000
12/15/2010	4:18:34 PM	SiCl4 MFC set to  0.000000
12/15/2010	4:18:34 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	4:18:34 PM	Tube furnace set to 1000
12/15/2010	4:38:34 PM	Helium valve closed
12/15/2010	4:38:34 PM	PH3 valve closed
12/15/2010	4:38:34 PM	Main Vac valve closed
12/15/2010	4:38:34 PM	Bypass valve closed
12/15/2010	4:38:34 PM	H2 valve opened
12/15/2010	4:38:34 PM	BCl3 valve opened
12/15/2010	4:38:34 PM	SiCl4 pre valve opened
12/15/2010	4:38:34 PM	SiCl4 post valve opened
12/15/2010	4:38:34 PM	Bubbler valve opened
12/15/2010	4:38:34 PM	Helium MFC set to  0.000000
12/15/2010	4:38:34 PM	H2 MFC set to  500.000000
12/15/2010	4:38:34 PM	BCl3 MFC set to  10.000000
12/15/2010	4:38:34 PM	PHl3 MFC set to  0.000000
12/15/2010	4:38:34 PM	SiCl4 MFC set to  50.000000
12/15/2010	4:38:34 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	4:38:34 PM	Tube furnace set to 1000
12/15/2010	4:53:34 PM	H2 valve closed
12/15/2010	4:53:34 PM	BCl3 valve closed
12/15/2010	4:53:34 PM	PH3 valve closed
12/15/2010	4:53:34 PM	SiCl4 pre valve closed
12/15/2010	4:53:34 PM	SiCl4 post valve closed
12/15/2010	4:53:34 PM	Main Vac valve closed
12/15/2010	4:53:34 PM	Bypass valve closed
12/15/2010	4:53:34 PM	Helium valve opened
12/15/2010	4:53:34 PM	Bubbler valve opened
12/15/2010	4:53:34 PM	Helium MFC set to  500.000000
12/15/2010	4:53:34 PM	H2 MFC set to  0.000000
12/15/2010	4:53:34 PM	BCl3 MFC set to  0.000000
12/15/2010	4:53:34 PM	PHl3 MFC set to  0.000000
12/15/2010	4:53:34 PM	SiCl4 MFC set to  0.000000
12/15/2010	4:53:34 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	4:53:35 PM	Tube furnace set to 0
12/15/2010	5:13:34 PM	Helium valve closed
12/15/2010	5:13:34 PM	H2 valve closed
12/15/2010	5:13:34 PM	BCl3 valve closed
12/15/2010	5:13:34 PM	PH3 valve closed
12/15/2010	5:13:34 PM	SiCl4 pre valve closed
12/15/2010	5:13:34 PM	SiCl4 post valve closed
12/15/2010	5:13:34 PM	Main Vac valve closed
12/15/2010	5:13:34 PM	Bypass valve closed
12/15/2010	5:13:34 PM	Bubbler valve closed
12/15/2010	5:13:34 PM	Helium MFC set to  0.000000
12/15/2010	5:13:34 PM	H2 MFC set to  0.000000
12/15/2010	5:13:34 PM	BCl3 MFC set to  0.000000
12/15/2010	5:13:34 PM	PHl3 MFC set to  0.000000
12/15/2010	5:13:34 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:13:34 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:13:35 PM	Tube furnace set to 0
12/15/2010	5:13:35 PM	Run finished at 5:13 PM
12/15/2010	5:40:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/15/2010	5:40:56 PM	Recipe started at 5:40 PM
12/15/2010	5:40:56 PM	H2 valve closed
12/15/2010	5:40:56 PM	BCl3 valve closed
12/15/2010	5:40:56 PM	PH3 valve closed
12/15/2010	5:40:56 PM	SiCl4 pre valve closed
12/15/2010	5:40:56 PM	SiCl4 post valve closed
12/15/2010	5:40:56 PM	Main Vac valve closed
12/15/2010	5:40:56 PM	Bypass valve closed
12/15/2010	5:40:56 PM	Bubbler valve closed
12/15/2010	5:40:56 PM	Helium valve opened
12/15/2010	5:40:56 PM	Helium MFC set to  500.000000
12/15/2010	5:40:56 PM	H2 MFC set to  0.000000
12/15/2010	5:40:56 PM	BCl3 MFC set to  0.000000
12/15/2010	5:40:56 PM	PHl3 MFC set to  0.000000
12/15/2010	5:40:56 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:40:56 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:40:56 PM	Tube furnace set to 0
12/15/2010	5:41:04 PM	Helium valve closed
12/15/2010	5:41:04 PM	H2 valve closed
12/15/2010	5:41:04 PM	BCl3 valve closed
12/15/2010	5:41:04 PM	PH3 valve closed
12/15/2010	5:41:04 PM	SiCl4 pre valve closed
12/15/2010	5:41:04 PM	SiCl4 post valve closed
12/15/2010	5:41:04 PM	Main Vac valve closed
12/15/2010	5:41:04 PM	Bypass valve closed
12/15/2010	5:41:04 PM	Bubbler valve closed
12/15/2010	5:41:04 PM	Helium MFC set to  0.000000
12/15/2010	5:41:04 PM	H2 MFC set to  0.000000
12/15/2010	5:41:04 PM	BCl3 MFC set to  0.000000
12/15/2010	5:41:04 PM	PHl3 MFC set to  0.000000
12/15/2010	5:41:04 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:41:04 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:41:04 PM	Tube furnace set to 0
12/15/2010	5:41:05 PM	Run finished at 5:41 PM
12/15/2010	5:41:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/15/2010	5:46:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/15/2010	5:47:04 PM	Recipe started at 5:46 PM
12/15/2010	5:47:04 PM	Helium valve closed
12/15/2010	5:47:04 PM	H2 valve closed
12/15/2010	5:47:04 PM	BCl3 valve closed
12/15/2010	5:47:04 PM	PH3 valve closed
12/15/2010	5:47:04 PM	SiCl4 pre valve closed
12/15/2010	5:47:04 PM	SiCl4 post valve closed
12/15/2010	5:47:04 PM	Main Vac valve closed
12/15/2010	5:47:04 PM	Bubbler valve closed
12/15/2010	5:47:04 PM	Bypass valve opened
12/15/2010	5:47:04 PM	Helium MFC set to  0.000000
12/15/2010	5:47:04 PM	H2 MFC set to  0.000000
12/15/2010	5:47:04 PM	BCl3 MFC set to  0.000000
12/15/2010	5:47:04 PM	PHl3 MFC set to  0.000000
12/15/2010	5:47:04 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:47:04 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:47:04 PM	Tube furnace set to 0
12/15/2010	5:48:03 PM	Helium valve closed
12/15/2010	5:48:03 PM	H2 valve closed
12/15/2010	5:48:03 PM	BCl3 valve closed
12/15/2010	5:48:03 PM	PH3 valve closed
12/15/2010	5:48:03 PM	SiCl4 pre valve closed
12/15/2010	5:48:03 PM	SiCl4 post valve closed
12/15/2010	5:48:03 PM	Bubbler valve closed
12/15/2010	5:48:03 PM	Main Vac valve opened
12/15/2010	5:48:03 PM	Bypass valve opened
12/15/2010	5:48:03 PM	Helium MFC set to  0.000000
12/15/2010	5:48:03 PM	H2 MFC set to  0.000000
12/15/2010	5:48:03 PM	BCl3 MFC set to  0.000000
12/15/2010	5:48:03 PM	PHl3 MFC set to  0.000000
12/15/2010	5:48:03 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:48:03 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:48:03 PM	Tube furnace set to 0
12/15/2010	5:49:03 PM	H2 valve closed
12/15/2010	5:49:03 PM	BCl3 valve closed
12/15/2010	5:49:03 PM	PH3 valve closed
12/15/2010	5:49:03 PM	SiCl4 pre valve closed
12/15/2010	5:49:03 PM	SiCl4 post valve closed
12/15/2010	5:49:03 PM	Bubbler valve closed
12/15/2010	5:49:03 PM	Helium valve opened
12/15/2010	5:49:03 PM	Main Vac valve opened
12/15/2010	5:49:03 PM	Bypass valve opened
12/15/2010	5:49:03 PM	Helium MFC set to  100.000000
12/15/2010	5:49:03 PM	H2 MFC set to  0.000000
12/15/2010	5:49:03 PM	BCl3 MFC set to  0.000000
12/15/2010	5:49:03 PM	PHl3 MFC set to  0.000000
12/15/2010	5:49:03 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:49:03 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:49:03 PM	Tube furnace set to 0
12/15/2010	5:50:03 PM	Helium valve closed
12/15/2010	5:50:03 PM	H2 valve closed
12/15/2010	5:50:03 PM	BCl3 valve closed
12/15/2010	5:50:03 PM	PH3 valve closed
12/15/2010	5:50:03 PM	SiCl4 pre valve closed
12/15/2010	5:50:03 PM	SiCl4 post valve closed
12/15/2010	5:50:03 PM	Bubbler valve closed
12/15/2010	5:50:03 PM	Main Vac valve opened
12/15/2010	5:50:03 PM	Bypass valve opened
12/15/2010	5:50:03 PM	Helium MFC set to  0.000000
12/15/2010	5:50:03 PM	H2 MFC set to  0.000000
12/15/2010	5:50:03 PM	BCl3 MFC set to  0.000000
12/15/2010	5:50:03 PM	PHl3 MFC set to  0.000000
12/15/2010	5:50:03 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:50:03 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:50:03 PM	Tube furnace set to 0
12/15/2010	5:51:03 PM	H2 valve closed
12/15/2010	5:51:03 PM	BCl3 valve closed
12/15/2010	5:51:03 PM	PH3 valve closed
12/15/2010	5:51:03 PM	SiCl4 pre valve closed
12/15/2010	5:51:03 PM	SiCl4 post valve closed
12/15/2010	5:51:03 PM	Bubbler valve closed
12/15/2010	5:51:03 PM	Helium valve opened
12/15/2010	5:51:03 PM	Main Vac valve opened
12/15/2010	5:51:03 PM	Bypass valve opened
12/15/2010	5:51:03 PM	Helium MFC set to  100.000000
12/15/2010	5:51:03 PM	H2 MFC set to  0.000000
12/15/2010	5:51:03 PM	BCl3 MFC set to  0.000000
12/15/2010	5:51:03 PM	PHl3 MFC set to  0.000000
12/15/2010	5:51:03 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:51:03 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:51:04 PM	Tube furnace set to 0
12/15/2010	5:52:04 PM	Helium valve closed
12/15/2010	5:52:04 PM	H2 valve closed
12/15/2010	5:52:04 PM	BCl3 valve closed
12/15/2010	5:52:04 PM	PH3 valve closed
12/15/2010	5:52:04 PM	SiCl4 pre valve closed
12/15/2010	5:52:04 PM	SiCl4 post valve closed
12/15/2010	5:52:04 PM	Bubbler valve closed
12/15/2010	5:52:04 PM	Main Vac valve opened
12/15/2010	5:52:04 PM	Bypass valve opened
12/15/2010	5:52:04 PM	Helium MFC set to  0.000000
12/15/2010	5:52:04 PM	H2 MFC set to  0.000000
12/15/2010	5:52:04 PM	BCl3 MFC set to  0.000000
12/15/2010	5:52:04 PM	PHl3 MFC set to  0.000000
12/15/2010	5:52:04 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:52:04 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:52:04 PM	Tube furnace set to 0
12/15/2010	5:53:04 PM	H2 valve closed
12/15/2010	5:53:04 PM	BCl3 valve closed
12/15/2010	5:53:04 PM	PH3 valve closed
12/15/2010	5:53:04 PM	SiCl4 pre valve closed
12/15/2010	5:53:04 PM	SiCl4 post valve closed
12/15/2010	5:53:04 PM	Bubbler valve closed
12/15/2010	5:53:04 PM	Helium valve opened
12/15/2010	5:53:04 PM	Main Vac valve opened
12/15/2010	5:53:04 PM	Bypass valve opened
12/15/2010	5:53:04 PM	Helium MFC set to  100.000000
12/15/2010	5:53:04 PM	H2 MFC set to  0.000000
12/15/2010	5:53:04 PM	BCl3 MFC set to  0.000000
12/15/2010	5:53:04 PM	PHl3 MFC set to  0.000000
12/15/2010	5:53:04 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:53:04 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:53:04 PM	Tube furnace set to 0
12/15/2010	5:54:04 PM	Helium valve closed
12/15/2010	5:54:04 PM	H2 valve closed
12/15/2010	5:54:04 PM	BCl3 valve closed
12/15/2010	5:54:04 PM	PH3 valve closed
12/15/2010	5:54:04 PM	SiCl4 pre valve closed
12/15/2010	5:54:04 PM	SiCl4 post valve closed
12/15/2010	5:54:04 PM	Bubbler valve closed
12/15/2010	5:54:04 PM	Main Vac valve opened
12/15/2010	5:54:04 PM	Bypass valve opened
12/15/2010	5:54:04 PM	Helium MFC set to  0.000000
12/15/2010	5:54:04 PM	H2 MFC set to  0.000000
12/15/2010	5:54:04 PM	BCl3 MFC set to  0.000000
12/15/2010	5:54:04 PM	PHl3 MFC set to  0.000000
12/15/2010	5:54:04 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:54:04 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:54:04 PM	Tube furnace set to 0
12/15/2010	5:55:04 PM	H2 valve closed
12/15/2010	5:55:04 PM	BCl3 valve closed
12/15/2010	5:55:04 PM	PH3 valve closed
12/15/2010	5:55:04 PM	SiCl4 pre valve closed
12/15/2010	5:55:04 PM	SiCl4 post valve closed
12/15/2010	5:55:04 PM	Bubbler valve closed
12/15/2010	5:55:04 PM	Helium valve opened
12/15/2010	5:55:04 PM	Main Vac valve opened
12/15/2010	5:55:04 PM	Bypass valve opened
12/15/2010	5:55:04 PM	Helium MFC set to  100.000000
12/15/2010	5:55:04 PM	H2 MFC set to  0.000000
12/15/2010	5:55:04 PM	BCl3 MFC set to  0.000000
12/15/2010	5:55:04 PM	PHl3 MFC set to  0.000000
12/15/2010	5:55:04 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:55:04 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:55:04 PM	Tube furnace set to 0
12/15/2010	5:56:04 PM	Helium valve closed
12/15/2010	5:56:04 PM	H2 valve closed
12/15/2010	5:56:04 PM	BCl3 valve closed
12/15/2010	5:56:04 PM	PH3 valve closed
12/15/2010	5:56:04 PM	SiCl4 pre valve closed
12/15/2010	5:56:04 PM	SiCl4 post valve closed
12/15/2010	5:56:04 PM	Bubbler valve closed
12/15/2010	5:56:04 PM	Main Vac valve opened
12/15/2010	5:56:04 PM	Bypass valve opened
12/15/2010	5:56:04 PM	Helium MFC set to  0.000000
12/15/2010	5:56:04 PM	H2 MFC set to  0.000000
12/15/2010	5:56:04 PM	BCl3 MFC set to  0.000000
12/15/2010	5:56:04 PM	PHl3 MFC set to  0.000000
12/15/2010	5:56:04 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:56:04 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:56:05 PM	Tube furnace set to 0
12/15/2010	5:57:05 PM	H2 valve closed
12/15/2010	5:57:05 PM	BCl3 valve closed
12/15/2010	5:57:05 PM	PH3 valve closed
12/15/2010	5:57:05 PM	SiCl4 pre valve closed
12/15/2010	5:57:05 PM	SiCl4 post valve closed
12/15/2010	5:57:05 PM	Bubbler valve closed
12/15/2010	5:57:05 PM	Helium valve opened
12/15/2010	5:57:05 PM	Main Vac valve opened
12/15/2010	5:57:05 PM	Bypass valve opened
12/15/2010	5:57:05 PM	Helium MFC set to  100.000000
12/15/2010	5:57:05 PM	H2 MFC set to  0.000000
12/15/2010	5:57:05 PM	BCl3 MFC set to  0.000000
12/15/2010	5:57:05 PM	PHl3 MFC set to  0.000000
12/15/2010	5:57:05 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:57:05 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:57:05 PM	Tube furnace set to 0
12/15/2010	5:58:05 PM	Helium valve closed
12/15/2010	5:58:05 PM	H2 valve closed
12/15/2010	5:58:05 PM	BCl3 valve closed
12/15/2010	5:58:05 PM	PH3 valve closed
12/15/2010	5:58:05 PM	SiCl4 pre valve closed
12/15/2010	5:58:05 PM	SiCl4 post valve closed
12/15/2010	5:58:05 PM	Bubbler valve closed
12/15/2010	5:58:05 PM	Main Vac valve opened
12/15/2010	5:58:05 PM	Bypass valve opened
12/15/2010	5:58:05 PM	Helium MFC set to  0.000000
12/15/2010	5:58:05 PM	H2 MFC set to  0.000000
12/15/2010	5:58:05 PM	BCl3 MFC set to  0.000000
12/15/2010	5:58:05 PM	PHl3 MFC set to  0.000000
12/15/2010	5:58:05 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:58:05 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:58:05 PM	Tube furnace set to 0
12/15/2010	5:59:05 PM	H2 valve closed
12/15/2010	5:59:05 PM	BCl3 valve closed
12/15/2010	5:59:05 PM	PH3 valve closed
12/15/2010	5:59:05 PM	SiCl4 pre valve closed
12/15/2010	5:59:05 PM	SiCl4 post valve closed
12/15/2010	5:59:05 PM	Bubbler valve closed
12/15/2010	5:59:05 PM	Helium valve opened
12/15/2010	5:59:05 PM	Main Vac valve opened
12/15/2010	5:59:05 PM	Bypass valve opened
12/15/2010	5:59:05 PM	Helium MFC set to  100.000000
12/15/2010	5:59:05 PM	H2 MFC set to  0.000000
12/15/2010	5:59:05 PM	BCl3 MFC set to  0.000000
12/15/2010	5:59:05 PM	PHl3 MFC set to  0.000000
12/15/2010	5:59:05 PM	SiCl4 MFC set to  0.000000
12/15/2010	5:59:05 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	5:59:05 PM	Tube furnace set to 0
12/15/2010	6:00:05 PM	Helium valve closed
12/15/2010	6:00:05 PM	H2 valve closed
12/15/2010	6:00:05 PM	BCl3 valve closed
12/15/2010	6:00:05 PM	PH3 valve closed
12/15/2010	6:00:05 PM	SiCl4 pre valve closed
12/15/2010	6:00:05 PM	SiCl4 post valve closed
12/15/2010	6:00:05 PM	Bubbler valve closed
12/15/2010	6:00:05 PM	Main Vac valve opened
12/15/2010	6:00:05 PM	Bypass valve opened
12/15/2010	6:00:05 PM	Helium MFC set to  0.000000
12/15/2010	6:00:05 PM	H2 MFC set to  0.000000
12/15/2010	6:00:05 PM	BCl3 MFC set to  0.000000
12/15/2010	6:00:05 PM	PHl3 MFC set to  0.000000
12/15/2010	6:00:05 PM	SiCl4 MFC set to  0.000000
12/15/2010	6:00:05 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	6:00:05 PM	Tube furnace set to 0
12/15/2010	6:01:05 PM	H2 valve closed
12/15/2010	6:01:05 PM	BCl3 valve closed
12/15/2010	6:01:05 PM	PH3 valve closed
12/15/2010	6:01:05 PM	SiCl4 pre valve closed
12/15/2010	6:01:05 PM	SiCl4 post valve closed
12/15/2010	6:01:05 PM	Bubbler valve closed
12/15/2010	6:01:05 PM	Helium valve opened
12/15/2010	6:01:05 PM	Main Vac valve opened
12/15/2010	6:01:05 PM	Bypass valve opened
12/15/2010	6:01:05 PM	Helium MFC set to  100.000000
12/15/2010	6:01:05 PM	H2 MFC set to  0.000000
12/15/2010	6:01:05 PM	BCl3 MFC set to  0.000000
12/15/2010	6:01:05 PM	PHl3 MFC set to  0.000000
12/15/2010	6:01:05 PM	SiCl4 MFC set to  0.000000
12/15/2010	6:01:05 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	6:01:06 PM	Tube furnace set to 0
12/15/2010	6:02:06 PM	Helium valve closed
12/15/2010	6:02:06 PM	H2 valve closed
12/15/2010	6:02:06 PM	BCl3 valve closed
12/15/2010	6:02:06 PM	PH3 valve closed
12/15/2010	6:02:06 PM	SiCl4 pre valve closed
12/15/2010	6:02:06 PM	SiCl4 post valve closed
12/15/2010	6:02:06 PM	Bubbler valve closed
12/15/2010	6:02:06 PM	Main Vac valve opened
12/15/2010	6:02:06 PM	Bypass valve opened
12/15/2010	6:02:06 PM	Helium MFC set to  0.000000
12/15/2010	6:02:06 PM	H2 MFC set to  0.000000
12/15/2010	6:02:06 PM	BCl3 MFC set to  0.000000
12/15/2010	6:02:06 PM	PHl3 MFC set to  0.000000
12/15/2010	6:02:06 PM	SiCl4 MFC set to  0.000000
12/15/2010	6:02:06 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	6:02:06 PM	Tube furnace set to 0
12/15/2010	6:03:06 PM	H2 valve closed
12/15/2010	6:03:06 PM	BCl3 valve closed
12/15/2010	6:03:06 PM	PH3 valve closed
12/15/2010	6:03:06 PM	SiCl4 pre valve closed
12/15/2010	6:03:06 PM	SiCl4 post valve closed
12/15/2010	6:03:06 PM	Bubbler valve closed
12/15/2010	6:03:06 PM	Helium valve opened
12/15/2010	6:03:06 PM	Main Vac valve opened
12/15/2010	6:03:06 PM	Bypass valve opened
12/15/2010	6:03:06 PM	Helium MFC set to  100.000000
12/15/2010	6:03:06 PM	H2 MFC set to  0.000000
12/15/2010	6:03:06 PM	BCl3 MFC set to  0.000000
12/15/2010	6:03:06 PM	PHl3 MFC set to  0.000000
12/15/2010	6:03:06 PM	SiCl4 MFC set to  0.000000
12/15/2010	6:03:06 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	6:03:06 PM	Tube furnace set to 0
12/15/2010	6:04:06 PM	Helium valve closed
12/15/2010	6:04:06 PM	H2 valve closed
12/15/2010	6:04:06 PM	BCl3 valve closed
12/15/2010	6:04:06 PM	PH3 valve closed
12/15/2010	6:04:06 PM	SiCl4 pre valve closed
12/15/2010	6:04:06 PM	SiCl4 post valve closed
12/15/2010	6:04:06 PM	Bubbler valve closed
12/15/2010	6:04:06 PM	Main Vac valve opened
12/15/2010	6:04:06 PM	Bypass valve opened
12/15/2010	6:04:06 PM	Helium MFC set to  0.000000
12/15/2010	6:04:06 PM	H2 MFC set to  0.000000
12/15/2010	6:04:06 PM	BCl3 MFC set to  0.000000
12/15/2010	6:04:06 PM	PHl3 MFC set to  0.000000
12/15/2010	6:04:06 PM	SiCl4 MFC set to  0.000000
12/15/2010	6:04:06 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	6:04:06 PM	Tube furnace set to 0
12/15/2010	6:05:06 PM	H2 valve closed
12/15/2010	6:05:06 PM	BCl3 valve closed
12/15/2010	6:05:06 PM	PH3 valve closed
12/15/2010	6:05:06 PM	SiCl4 pre valve closed
12/15/2010	6:05:06 PM	SiCl4 post valve closed
12/15/2010	6:05:06 PM	Bubbler valve closed
12/15/2010	6:05:06 PM	Helium valve opened
12/15/2010	6:05:06 PM	Main Vac valve opened
12/15/2010	6:05:06 PM	Bypass valve opened
12/15/2010	6:05:06 PM	Helium MFC set to  100.000000
12/15/2010	6:05:06 PM	H2 MFC set to  0.000000
12/15/2010	6:05:06 PM	BCl3 MFC set to  0.000000
12/15/2010	6:05:06 PM	PHl3 MFC set to  0.000000
12/15/2010	6:05:06 PM	SiCl4 MFC set to  0.000000
12/15/2010	6:05:06 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	6:05:06 PM	Tube furnace set to 0
12/15/2010	6:06:06 PM	Helium valve closed
12/15/2010	6:06:06 PM	H2 valve closed
12/15/2010	6:06:06 PM	BCl3 valve closed
12/15/2010	6:06:06 PM	PH3 valve closed
12/15/2010	6:06:06 PM	SiCl4 pre valve closed
12/15/2010	6:06:06 PM	SiCl4 post valve closed
12/15/2010	6:06:06 PM	Bubbler valve closed
12/15/2010	6:06:06 PM	Main Vac valve opened
12/15/2010	6:06:06 PM	Bypass valve opened
12/15/2010	6:06:06 PM	Helium MFC set to  0.000000
12/15/2010	6:06:06 PM	H2 MFC set to  0.000000
12/15/2010	6:06:06 PM	BCl3 MFC set to  0.000000
12/15/2010	6:06:06 PM	PHl3 MFC set to  0.000000
12/15/2010	6:06:06 PM	SiCl4 MFC set to  0.000000
12/15/2010	6:06:06 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	6:06:07 PM	Tube furnace set to 0
12/15/2010	6:07:07 PM	H2 valve closed
12/15/2010	6:07:07 PM	BCl3 valve closed
12/15/2010	6:07:07 PM	PH3 valve closed
12/15/2010	6:07:07 PM	SiCl4 pre valve closed
12/15/2010	6:07:07 PM	SiCl4 post valve closed
12/15/2010	6:07:07 PM	Bubbler valve closed
12/15/2010	6:07:07 PM	Helium valve opened
12/15/2010	6:07:07 PM	Main Vac valve opened
12/15/2010	6:07:07 PM	Bypass valve opened
12/15/2010	6:07:07 PM	Helium MFC set to  100.000000
12/15/2010	6:07:07 PM	H2 MFC set to  0.000000
12/15/2010	6:07:07 PM	BCl3 MFC set to  0.000000
12/15/2010	6:07:07 PM	PHl3 MFC set to  0.000000
12/15/2010	6:07:07 PM	SiCl4 MFC set to  0.000000
12/15/2010	6:07:07 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	6:07:07 PM	Tube furnace set to 0
12/15/2010	6:08:07 PM	Helium valve closed
12/15/2010	6:08:07 PM	H2 valve closed
12/15/2010	6:08:07 PM	BCl3 valve closed
12/15/2010	6:08:07 PM	PH3 valve closed
12/15/2010	6:08:07 PM	SiCl4 pre valve closed
12/15/2010	6:08:07 PM	SiCl4 post valve closed
12/15/2010	6:08:07 PM	Bubbler valve closed
12/15/2010	6:08:07 PM	Main Vac valve opened
12/15/2010	6:08:07 PM	Bypass valve opened
12/15/2010	6:08:07 PM	Helium MFC set to  0.000000
12/15/2010	6:08:07 PM	H2 MFC set to  0.000000
12/15/2010	6:08:07 PM	BCl3 MFC set to  0.000000
12/15/2010	6:08:07 PM	PHl3 MFC set to  0.000000
12/15/2010	6:08:07 PM	SiCl4 MFC set to  0.000000
12/15/2010	6:08:07 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	6:08:07 PM	Tube furnace set to 0
12/15/2010	6:08:08 PM	Run finished at 6:08 PM
12/15/2010	6:08:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/15/2010	11:33:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/15/2010	11:33:59 PM	Recipe started at 11:33 PM
12/15/2010	11:33:59 PM	Helium valve closed
12/15/2010	11:33:59 PM	H2 valve closed
12/15/2010	11:33:59 PM	BCl3 valve closed
12/15/2010	11:33:59 PM	PH3 valve closed
12/15/2010	11:33:59 PM	SiCl4 pre valve closed
12/15/2010	11:33:59 PM	SiCl4 post valve closed
12/15/2010	11:33:59 PM	Main Vac valve closed
12/15/2010	11:33:59 PM	Bypass valve closed
12/15/2010	11:33:59 PM	Bubbler valve closed
12/15/2010	11:33:59 PM	Helium MFC set to  0.000000
12/15/2010	11:33:59 PM	H2 MFC set to  0.000000
12/15/2010	11:33:59 PM	BCl3 MFC set to  0.000000
12/15/2010	11:33:59 PM	PHl3 MFC set to  0.000000
12/15/2010	11:33:59 PM	SiCl4 MFC set to  0.000000
12/15/2010	11:33:59 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	11:33:59 PM	Tube furnace set to 0
12/15/2010	11:33:59 PM	Run finished at 11:33 PM
12/15/2010	11:33:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/15/2010	11:34:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/15/2010	11:34:11 PM	Recipe started at 11:34 PM
12/15/2010	11:34:11 PM	Helium valve closed
12/15/2010	11:34:11 PM	H2 valve closed
12/15/2010	11:34:11 PM	BCl3 valve closed
12/15/2010	11:34:11 PM	PH3 valve closed
12/15/2010	11:34:11 PM	SiCl4 pre valve closed
12/15/2010	11:34:11 PM	SiCl4 post valve closed
12/15/2010	11:34:11 PM	Main Vac valve closed
12/15/2010	11:34:11 PM	Bubbler valve closed
12/15/2010	11:34:11 PM	Bypass valve opened
12/15/2010	11:34:11 PM	Helium MFC set to  0.000000
12/15/2010	11:34:11 PM	H2 MFC set to  0.000000
12/15/2010	11:34:11 PM	BCl3 MFC set to  0.000000
12/15/2010	11:34:11 PM	PHl3 MFC set to  0.000000
12/15/2010	11:34:11 PM	SiCl4 MFC set to  0.000000
12/15/2010	11:34:11 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	11:34:11 PM	Tube furnace set to 0
12/15/2010	11:34:11 PM	Helium valve closed
12/15/2010	11:34:11 PM	H2 valve closed
12/15/2010	11:34:11 PM	BCl3 valve closed
12/15/2010	11:34:11 PM	PH3 valve closed
12/15/2010	11:34:11 PM	SiCl4 pre valve closed
12/15/2010	11:34:11 PM	SiCl4 post valve closed
12/15/2010	11:34:11 PM	Bubbler valve closed
12/15/2010	11:34:11 PM	Main Vac valve opened
12/15/2010	11:34:11 PM	Bypass valve opened
12/15/2010	11:34:11 PM	Helium MFC set to  0.000000
12/15/2010	11:34:11 PM	H2 MFC set to  0.000000
12/15/2010	11:34:11 PM	BCl3 MFC set to  0.000000
12/15/2010	11:34:11 PM	PHl3 MFC set to  0.000000
12/15/2010	11:34:11 PM	SiCl4 MFC set to  0.000000
12/15/2010	11:34:11 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	11:34:11 PM	Tube furnace set to 0
12/15/2010	11:34:12 PM	Run finished at 11:34 PM
12/15/2010	11:34:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/15/2010	11:34:51 PM	Recipe started at 11:34 PM
12/15/2010	11:34:51 PM	Helium valve closed
12/15/2010	11:34:51 PM	BCl3 valve closed
12/15/2010	11:34:51 PM	PH3 valve closed
12/15/2010	11:34:51 PM	SiCl4 pre valve closed
12/15/2010	11:34:51 PM	SiCl4 post valve closed
12/15/2010	11:34:51 PM	Main Vac valve closed
12/15/2010	11:34:51 PM	Bypass valve closed
12/15/2010	11:34:51 PM	Bubbler valve closed
12/15/2010	11:34:51 PM	H2 valve opened
12/15/2010	11:34:51 PM	Helium MFC set to  0.000000
12/15/2010	11:34:51 PM	H2 MFC set to  500.000000
12/15/2010	11:34:51 PM	BCl3 MFC set to  0.000000
12/15/2010	11:34:51 PM	PHl3 MFC set to  0.000000
12/15/2010	11:34:51 PM	SiCl4 MFC set to  0.000000
12/15/2010	11:34:51 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	11:34:52 PM	Tube furnace set to 100
12/15/2010	11:36:14 PM	Helium valve closed
12/15/2010	11:36:14 PM	BCl3 valve closed
12/15/2010	11:36:14 PM	PH3 valve closed
12/15/2010	11:36:14 PM	SiCl4 pre valve closed
12/15/2010	11:36:14 PM	SiCl4 post valve closed
12/15/2010	11:36:14 PM	Main Vac valve closed
12/15/2010	11:36:14 PM	Bypass valve closed
12/15/2010	11:36:14 PM	H2 valve opened
12/15/2010	11:36:14 PM	Bubbler valve opened
12/15/2010	11:36:14 PM	Helium MFC set to  0.000000
12/15/2010	11:36:14 PM	H2 MFC set to  500.000000
12/15/2010	11:36:14 PM	BCl3 MFC set to  0.000000
12/15/2010	11:36:14 PM	PHl3 MFC set to  0.000000
12/15/2010	11:36:14 PM	SiCl4 MFC set to  0.000000
12/15/2010	11:36:14 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	11:36:14 PM	Tube furnace set to 1000
12/15/2010	11:56:14 PM	Helium valve closed
12/15/2010	11:56:14 PM	PH3 valve closed
12/15/2010	11:56:14 PM	Main Vac valve closed
12/15/2010	11:56:14 PM	Bypass valve closed
12/15/2010	11:56:14 PM	H2 valve opened
12/15/2010	11:56:14 PM	BCl3 valve opened
12/15/2010	11:56:14 PM	SiCl4 pre valve opened
12/15/2010	11:56:14 PM	SiCl4 post valve opened
12/15/2010	11:56:14 PM	Bubbler valve opened
12/15/2010	11:56:14 PM	Helium MFC set to  0.000000
12/15/2010	11:56:14 PM	H2 MFC set to  500.000000
12/15/2010	11:56:14 PM	BCl3 MFC set to  10.000000
12/15/2010	11:56:14 PM	PHl3 MFC set to  0.000000
12/15/2010	11:56:14 PM	SiCl4 MFC set to  50.000000
12/15/2010	11:56:14 PM	Bypass solenoid MFC set to  0.000000
12/15/2010	11:56:14 PM	Tube furnace set to 1000
